Light semiconductor device

Abstract

Abstract PURPOSE:To readily and accurately couple a light between opticalfibers and a light semiconductor element by forming a semiconductor layer formed with recesses for receiving optical fibers a light transmitting insulating layer with a cover for a light semiconductor element containing container. CONSTITUTION:A light semiconductor element 2 having light receiving regions 3 is contained in an enclosed container body 1. The cover of the body 1 is formed of a light transmitting insulating layer 4 such as sapphire, amorphous alumina, silicon dioxide or the like and a semiconductor layer 5 having conical holes 6 in a laminate. Optical fibers 7 are inserted into the holes 6, and coupled with light through the layer 4 with the regions 3. After the cover is formed with the layer 4 on a semiconductor substrate 5 such as silicon by an epitaxial growing process, it is formed with holes 6 by etching the surface not formed with the layer 4.

Inventors

• 👤 Shuzo Kagawa
• 👤 Takao Kaneda
• 👤 Masaru Ihara
• 👤 Yoshihiro Arimoto

Bibliographic Details