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JPS54882A Expired / Lapsed JP ⏱️ 0.0 years remaining

Manufacture of field effect transistor

Assignee: Fujitsu Ltd
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Filing: 1977-06-03
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Granted: —
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Expires: 1997-06-03
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Abstract

Abstract PURPOSE: To reduce the gate length and then to enhance the high frequency properties, by forming a gate electrode through multi-layer lamination of more than two different kinds of metal by use of the self-alignment system. COPYRIGHT: (C)1979,JPO&Japio

Inventors

  • 👤 Toshio Usui

Bibliographic Details

Application Number —
Jurisdiction JP
Data Source google_patents
Last Synchronized 2026-11-06 12:26
CPC Classifications
—

Claims Analysis

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References Cited (Backward Citations)

JPS4896289A Cited
JPS4946874A Cited
JPS5040947A Cited

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