Patent JPS548467A successfully refreshed from Google Patents.
JPS548467A
Expired / Lapsed
JP
⏱️ 0.0 years remaining
Photo etching method
Assignee: NEC Corp
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Filing: 1977-06-21
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Granted: —
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Expires: 1997-06-21
Abstract
Abstract PURPOSE: To obtain the metallic wiring film of desired pattern surely, by first using positive type photo sensitive agent and after that, by using negative type photo sensitive agent, even if complicated concave steps are present, due to insulation film or conductive film of each part of a semiconductor. COPYRIGHT: (C)1979,JPO&Japio
Inventors
- 👤 Kenzo Yamazaki
Bibliographic Details
Application Number
—
Jurisdiction
JP
Data Source
google_patents
Last Synchronized
2026-10-25 23:20
CPC Classifications
—
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