Patent JPS548465A successfully refreshed from Google Patents.
JPS548465A
Expired / Lapsed
JP
⏱️ 0.0 years remaining
Etching method
Assignee: Hitachi Ltd
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Filing: 1977-06-22
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Granted: —
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Expires: 1997-06-22
Abstract
Abstract PURPOSE: To simply know the end of etching and to utilize it for automation, by connecting two electrode terminals on the test piece surface and by detecting the electric resistance of the material changing together with the progress of etching, in etching conductive materials. COPYRIGHT: (C)1979,JPO&Japio
Inventors
- 👤 Tatsumi Mizutani
- 👤 Hideo Komatsu
- 👤 Shinya Iida
Bibliographic Details
Application Number
—
Jurisdiction
JP
Data Source
google_patents
Last Synchronized
2026-11-01 18:02
CPC Classifications
—
Claims Analysis
Total Claims: 0
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References Cited (Backward Citations)
JPS5384475A
Cited
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