Optical step meter

Abstract

Abstract PURPOSE: To make it possible to accurately meter the pattern thickness of a print plate wiring in a non-contact manner by shifting an optical system for irradiating the surface of a test piece, which is made of plural different materials, relative to the test piece. CONSTITUTION: A print plate, which has its ceramic substrate 5 printed with a wiring pattern 4, is irradiated with the laser beam from its source 1 to establish a bright spot 6. An optical system, which is composed of a reflected light detector 9 for metering the reflected scattered light from the bright spot 6, a lens 3 for focusing the bright spot 6, and a position metering device 2 for metering the position of the real image of the bright spot 6, is shifted relative to the print plate so that the change in the material of the test piece is judged by the guantity of light entering the detector 9 and so that the positional shift of the real image of the bright spot 6 is metered by the device 2. Thus, it is possible to meter the thickness of the print plate wiring pattern without damaging the surface in a non-contact manner. COPYRIGHT: (C)1979,JPO&Japio

Inventors

• 👤 Masahito Nakajima
• 👤 Moritoshi Ando

Bibliographic Details