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JPS5437580A
Expired / Lapsed
JP
⏱️ 0.0 years remaining
Dry etching method and target film used for it
Assignee: NEC Corp
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Filing: 1977-08-30
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Granted: —
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Expires: 1997-08-30
Abstract
Abstract PURPOSE: On a target electrode, a coating material made into a film is pressureadhered by using an adhesive, an etched sample is placed on the film and etched, and the consumed film is replaced with a new one, thereby etching it. COPYRIGHT: (C)1979,JPO&Japio
Inventors
- 👤 Masao Tajima
- 👤 Yukinori Kuroki
- 👤 Koji Mizusawa
- 👤 Makoto Asakawa
Bibliographic Details
Application Number
—
Jurisdiction
JP
Data Source
google_patents
Last Synchronized
2026-11-09 09:15
CPC Classifications
—
Claims Analysis
Total Claims: 0
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References Cited (Backward Citations)
JPS4991771A
Cited
JPS5259580A
Cited
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