Magnetic bubble memory element and its manufacture

Abstract

Abstract PURPOSE: To eliminate the stage error and thus to enhance the bubble action property as well as simplify the manufacturing processes by securing fomation of the soft magnetic substance patterns within the same plane by providing the insulator film layer and the conductor layer right under the soft magnetic substance pattern. CONSTITUTION: Insulator film 4 and 4' plus conductor layer 3 and 3' are always provided under soft magnetic substance pattern 5 and 5'. In this respect, pattern 5 and 5' are formed completely within the same plane, and the stage error is caused at the area where pattern 5 overlaps layer 3. Thus, no deterioration is caused for the bubble action property. In this case, layer 4' and 3' under pattern 5' function just as the spacers, but layer 3 under pattern 5 functions as the electric conductor for bubble control purpose. COPYRIGHT: (C)1979,JPO&Japio

Inventors

• 👤 Hideki Nishida
• 👤 Koji Yamada
• 👤 Masaki Takahashi
• 👤 Hiroshi Umezaki
• 👤 Yutaka Sugita
• 👤 Norikazu Tsumita

Bibliographic Details