Patent JPS537586A successfully refreshed from Google Patents.
JPS537586A
Expired / Lapsed
JP
⏱️ 0.0 years remaining
Cathodic spattering apparatus
Assignee: Sloan Technology Corp
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Filing: 1977-02-19
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Granted: —
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Expires: 1997-02-19
Abstract
No abstract record available.
Inventors
- 👤 Efu Koobani Jiyon
Bibliographic Details
Application Number
—
Jurisdiction
JP
Data Source
google_patents
Last Synchronized
2026-11-08 02:51
CPC Classifications
H; H01; H01J; H01J37/00; H01J37/32; H01J37/34; H01J37/3402; H01J37/3405
Claims Analysis
Total Claims: 0
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References Cited (Backward Citations)
JPS5186083A
Cited
JPS5295581A
Cited
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