Patent JPS5373072A successfully refreshed from Google Patents.
JPS5373072A
Expired / Lapsed
JP
⏱️ 0.0 years remaining
Formation of oxidized film
Assignee: Sony Corp
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Filing: 1976-12-13
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Granted: —
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Expires: 1996-12-13
Abstract
Abstract PURPOSE: To form an oxidized film containing no impurity by contracting the defect inside a substrate through heat treatment after the formation an oxide containing halogen atoms on the semiconductor layer. COPYRIGHT: (C)1978,JPO&Japio
Inventors
- 👤 Seiji Kawato
Bibliographic Details
Application Number
—
Jurisdiction
JP
Data Source
google_patents
Last Synchronized
2026-11-09 04:33
CPC Classifications
—
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