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JPS5364472A Expired / Lapsed JP ⏱️ 0.0 years remaining

Processing apparatus

Assignee: Hitachi Ltd
•
Filing: 1976-11-22
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Granted: —
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Expires: 1996-11-22
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Abstract

Abstract PURPOSE: To maintain the environment in a treatment room in a satisfactory state by letting a liquid form substance form substance fall onto the inside side wall surface of the treatment room from the upper part of the inside side wall surface to the lower part. COPYRIGHT: (C)1978,JPO&Japio

Inventors

  • 👤 Susumu Kano
  • 👤 Takao Kawanabe

Bibliographic Details

Application Number —
Jurisdiction JP
Data Source google_patents
Last Synchronized 2026-11-05 21:14
CPC Classifications
—

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