Patent JPS5340281A successfully refreshed from Google Patents.
JPS5340281A
Expired / Lapsed
JP
⏱️ 0.0 years remaining
Photo mask material and manufacturtof it
Assignee: Konica Minolta Inc
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Filing: 1976-09-27
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Granted: —
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Expires: 1996-09-27
Abstract
Abstract PURPOSE: On a transparent substrate such as glass, the thickness-respectivelyprescribed chrome film by a sputter method, and chrome film and chrome oxide film both by a vacuum evaporation method are laminated, so that the acid-proof phot to mask can be obtained having the thin total thickness, no pin hole and high resolution. COPYRIGHT: (C)1978,JPO&Japio
Inventors
- 👤 Kunio Sakurai
Bibliographic Details
Application Number
—
Jurisdiction
JP
Data Source
google_patents
Last Synchronized
2026-11-09 06:04
CPC Classifications
G; G03; G03F; G03F1/00; G03F1/38; G03F1/46; C; C23; C23C; C23C14/00; C23C14/06; C23C14/08; C23C14/083; C23C14/14; C23C14/18; G03F1/54; G03F1/58
Claims Analysis
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References Cited (Backward Citations)
JPS50109672A
Cited
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