Patent JPS5339874A successfully refreshed from Google Patents.
JPS5339874A
Expired / Lapsed
JP
⏱️ 0.0 years remaining
Vacuum pincette
Assignee: Hitachi Ltd
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Filing: 1976-09-24
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Granted: —
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Expires: 1996-09-24
Abstract
Abstract PURPOSE: To smoothly detaches wafers by providing a valve mechanism for changing over of air suction line. COPYRIGHT: (C)1978,JPO&Japio
Inventors
- 👤 Akiyoshi Yamanaka
Bibliographic Details
Application Number
—
Jurisdiction
JP
Data Source
google_patents
Last Synchronized
2026-11-08 04:42
CPC Classifications
—
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