Patent JPS5295166A successfully refreshed from Google Patents.
JPS5295166A
Expired / Lapsed
JP
⏱️ 0.0 years remaining
Wafer dryer
Assignee: Hitachi Ltd
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Filing: 1976-02-06
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Granted: —
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Expires: 1996-02-06
Abstract
Abstract PURPOSE: To prevent turbulent air and mist from re-adhering to wafers by providing an upper board upon rapidly rotating multi-stage shelves. COPYRIGHT: (C)1977,JPO&Japio
Inventors
- 👤 Shogo Kiyota
- 👤 Tetsuya Mizutani
Bibliographic Details
Application Number
—
Jurisdiction
JP
Data Source
google_patents
Last Synchronized
2026-11-01 23:29
CPC Classifications
—
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