Patent JPS5270752A successfully refreshed from Google Patents.
JPS5270752A
Expired / Lapsed
JP
⏱️ 0.0 years remaining
Manufacture of semiconductor device
Assignee: Fujitsu Ltd
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Filing: 1975-12-10
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Granted: —
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Expires: 1995-12-10
Abstract
Abstract PURPOSE: The crystal plate is covered onto element formation surface side of wafer in such a way that wafer may be coincided with cleavage surface, and then the crystal plate is scribed. In this way, thin wafer can be scribed without producing any distortion nor breakage of the element. COPYRIGHT: (C)1977,JPO&Japio
Inventors
- 👤 Akihiro Shibatomi
Bibliographic Details
Application Number
—
Jurisdiction
JP
Data Source
google_patents
Last Synchronized
2026-11-09 18:18
CPC Classifications
—
Claims Analysis
Total Claims: 0
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