Patent JPS5267584A successfully refreshed from Google Patents.
JPS5267584A
Expired / Lapsed
JP
⏱️ 0.0 years remaining
Semiconductor diaphragm
Assignee: Hitachi Ltd
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Filing: 1975-12-03
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Granted: —
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Expires: 1995-12-03
Abstract
Abstract PURPOSE: To improve precision and increase distortion output signal through improving the sensitivity of the distortion producing part by providing a thick fixed part and a thin and even distorting part to a semiconductor diaphragm to be used for a pressure to electric signal convertor device. COPYRIGHT: (C)1977,JPO&Japio
Inventors
- 👤 Satoshi Shimada
- 👤 Yasumasa Matsuda
- 👤 Kazuji Yamada
- 👤 Toru Sugawara
- 👤 Kosuke Nakamura
- 👤 Kazumichi Kimura
Bibliographic Details
Application Number
—
Jurisdiction
JP
Data Source
google_patents
Last Synchronized
2026-11-02 04:42
CPC Classifications
—
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