Patent JPS5266884A successfully refreshed from Google Patents.
JPS5266884A
Expired / Lapsed
JP
⏱️ 0.0 years remaining
Process for forming film on base material
Assignee: NTT Inc
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Filing: 1975-12-01
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Granted: —
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Expires: 1995-12-01
Abstract
Abstract PURPOSE:To form a film efficientlyby use of a small size apparatus by heating base materaial locally on which a film is formed and directing raw materail gas only to the heated area.
Inventors
- 👤 Yoshihiro Imamura
- 👤 Kazushige Minegishi
Bibliographic Details
Application Number
—
Jurisdiction
JP
Data Source
google_patents
Last Synchronized
2026-11-03 19:15
CPC Classifications
C; C23; C23C; C23C16/00; C23C16/04; C23C16/047; C23C16/44; C23C16/48; C23C16/481
Claims Analysis
Total Claims: 0
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