Patent JPS52113162A successfully refreshed from Google Patents.
JPS52113162A
Expired / Lapsed
JP
⏱️ 0.0 years remaining
Preparation of semiconductor device
Assignee: Hitachi Ltd
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Filing: 1976-03-19
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Granted: —
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Expires: 1996-03-19
Abstract
Abstract PURPOSE: To prevent corrosion of an electrode or wiring by making the surface of a PSG layer smooth by heat treatment and thereafter, removing P. surface of a PSG layer smooth by heat treatment and thereafter, removing P. COPYRIGHT: (C)1977,JPO&Japio
Inventors
- 👤 Tatsumi Shirasu
- 👤 Yasutake Kuki
- 👤 Shigeru Shimada
Bibliographic Details
Application Number
—
Jurisdiction
JP
Data Source
google_patents
Last Synchronized
2026-10-31 20:09
CPC Classifications
—
Claims Analysis
Total Claims: 0
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