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JPH102768A Expired / Lapsed JP ⏱️ 0.0 years remaining

Flow meter

Assignee: Tokyo Electron Ltd
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Filing: 1996-06-13
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Granted: —
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Expires: 2016-06-13
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Abstract

Abstract Translated from Japanese (57)【要約】 【課題】 操作性およびメンテナンス性に優れたフロー メータを提供する。 【解決手段】 流量に応じて変位する移動体3を収容し た流量計測管4を有するフローメータ本体2と、その流 量計測管4に沿って移動可能に設けられ、上記移動体3 を介して流量限界点を検知する検知器14を有する可動 ブロック15と、この可動ブロック15を所望の位置に 設定して固定する摘み16とを備え、上記摘み16を上 記フローメータ本体2の前面に配置している。 (57) [Problem] To provide a flow meter excellent in operability and maintainability. SOLUTION: The flow meter main body 2 having a flow rate measuring pipe 4 accommodating a moving body 3 displaced in accordance with a flow rate, and the movable body 3 is provided so as to be movable along the flow rate measuring pipe 4. A movable block 15 having a detector 14 for detecting a flow rate limit point via a control unit, and a knob 16 for setting and fixing the movable block 15 at a desired position. Has been placed.

Inventors

  • 👤 Kengo Uenaka
  • 👤 健吾 上中
  • 👤 Tadayuki Jiyousada
  • 👤 忠行 城定

Bibliographic Details

Application Number —
Jurisdiction JP
Data Source google_patents
Last Synchronized 2026-11-09 07:07
CPC Classifications
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