Interface device between substrate processor

Abstract

Abstract PURPOSE:To enable the waiting time of the other process device to be extremely cut down even if one process device makes trouble by a method wherein a substrate delivery mechanism is equipped with a free elevating substrate tack receiving arm lifting up above the substrate delivery mechanism and holding the substrate held by the mechanism. CONSTITUTION:The title interface device 3 is equipped with a substrate delivery mechanism 6 respectively facing the substrate carrying-out part of the upper hand side processor 1 and the substrate carrying-in part of the lower hand side processor 2, a substrate storage part 8 fitted with a cassette 7 capable of containing wafers W in multiple stages by the side of the mechanism 6 and an arm 9 corresponding to the substrate containing and delivery mechanisms 6, 8. On the other hand, the substrate delivery mechanism 6 is equipped with the arm 9 freely elevating and moving horizontally and laterally, freely elevating three, each of holding pins 10 for mounting substrate, a substrate aligning means 11 for aligning the substrate W mounted on the holding pins 10, a substrate tack recieving arm 12 elevating with the aligned substrate mounted thereon and the driving means of the substrate matching means 11 and the substrate receiving arm 12.

Inventors

• 👤 Masami Otani
• 👤 正美 大谷
• 👤 Yoshiji Oka
• 👤 岡　義二
• 👤 Takeo Okamoto
• 👤 健男 岡本
• 👤 Yoshimitsu Fukutomi
• 👤 義光 福冨

Bibliographic Details