Drawing method by charged particle beam

Abstract

Abstract PURPOSE:To draw a prescribed trapezoid pattern by a method wherein a rectangular beam whose height corresponds to the difference between the height of a part which has been shot M times and the height of a prescribed trapezoid is shot after a final shooting operation. CONSTITUTION:A trapezoid pattern data is sent to a trapezoid pattern development operation unit 13 from a pattern data generation unit 12. Said operation unit develops the sent trapezoid pattern data in individual shooting positions P11, P12, P13,..., PM-1, PM, individual widths H11, H12, H13,..., HM-1, HM and each height V10 of individual rectangular beams to be shot in order to form a trapezoid pattern and, additionally, in a shooting position PM+1, a width HM+1 and a height Va of one more rectangular beam. These drawing data are once stored in a data memory 14. The trapezoid pattern development operation unit 13 sequentially accesses a width, a height data and a shooting position data for each beam to be shot. After a last shooting operation, the height of a rectangular beam to be shot once excessively is set to a value corresponding to the difference between the height of a part which has been shot M times and the height of a prescribed trapezoid.

Inventors

• 👤 Osamu Wakimoto
• 👤 脇本　治

Bibliographic Details