Coating device

Abstract

Abstract PURPOSE:To make maintenance easy and a structure adaptable for changes in size of the object to be treated by attaching a plate for preventing a treating liq. from rebounding against the object detachably to an opening part of a cup-like container. CONSTITUTION:A rotary support 20 adapted to rotate with the object W to be retained thereon is provided in a cup-like container 1. A treating liq. is supplied from an opening part 7A of the cup-like container 1 above the rotary support 20 onto the surface of the object W on the rotary support and the object W is rotated by the rotary support 20, whereby the treating liq. is applied to the surface of the object W in a desired film thickness. An annularly-shaped rebound preventing plate 30 is attached detachably to the opening part 7A of the container 1 to prevent the treating liq. scattering from the object W from impinging against the wall of the container 1 and rebounding against the object W. As a result, the maintenance becomes easy and the rebound preventing plate can be replaced according to changes in size of the object.

Inventors

• 👤 Norimitsu Morioka
• 👤 森岡　則光

Bibliographic Details