Manufacture of solid-state image sensing device

Abstract

Abstract PURPOSE:To form a micro-lens having high reliability and a large curvature by forming the micro-lens in such a way that a photosensitive resist applied to the entire surface of a transparent resin body is dried by heating at a low temperature and a pattern is treated while the pattern is heated at an intermediate temperature, and then, the formed micro-lens is heat-treated. CONSTITUTION:The first acrylic flat film 3 of an acrylic resin is formed on the uneven surfaces of a substrate 1 for a CCD solid-state image sensing element and photodiode 2 and a thin-film color filter 4 for separating white light is formed on the film 3. By repeating an applying and drying processes which applies an acrylic resin to the uneven surfaces and dries the resin by heating 2-5 times, the second acrylic flat film 5 which is high in flatness is formed. Then a material 6 for micro-lens is applied by turning to the entire surface of the film 5 to a thickness of >=0.5mum and the material 6 is dried at a low temperature. A desired three-dimensional shape is formed by selectively exposing the material 6 to gamma rays. Thereafter, the entire body of the three- dimensional shape and the entire surface of the second acrylic fat film 5 are exposed to gamma rays. Then a micro-lens having a desired large curvature is formed by heating the material 6 at an intermediate temperature.

Inventors

• 👤 Hiromitsu Aoki
• 👤 青木　裕光
• 👤 Yoshikazu Sano
• 👤 佐野　義和
• 👤 Toru Nomura
• 👤 徹 野村
• 👤 Tadashi Aoki
• 👤 正 青木
• 👤 Koutatsu Kodama
• 👤 宏達 児玉

Bibliographic Details