Magnetic levitation type carrying robot in vacuum

Abstract

Abstract PURPOSE:To disuse a sliding part and a rotating part to eliminate dust in a vacuum side, and eliminate gas discharge by forming a R shaft, a theta shaft and a Z shaft into magnetical levitation type. CONSTITUTION:About a R shaft, to drive a moving piece 5 fitted to a carrying vehicle 4 loaded with an article to be carried, pulse current is supplied to multiple electromagnets 6 positioned in an outside air side in order to move the moving piece 5 straightly along a stator 8. About a theta shaft, gears 15, 16 are rotated by drive of a motor 17 to rotate an inside cylinder 12 of the theta shaft to any direction at any angle, and a magnetically connected T-part 9 of a carrying pipe is rotated to rotate the whole of the R shaft. Next, about a Z shaft, a guide fixed to an outside cylinder 13 of the theta shaft is guided to move the whole of the outside cylinder 13 of the theta shaft vertically with feed of a feeding screw 18. Similarly, an electromagnet 11 fitted to the inside cylinder 12 of the theta shaft is moved vertically to move the whole of the R shaft vertically.

Inventors

• 👤 Shinji Koyano
• 👤 小谷野　真次

Bibliographic Details