Semiconductor device

Abstract

Abstract PURPOSE:To eliminate influence of contact resistance between a measuring probe and electrodes and improve measuring accuracy without giving increase of occupied area and fall of working efficiency by providing a resistor having comparatively small resistance value to the center of circuit, among three or more resistors connected in series to form a test circuit. CONSTITUTION:A voltage difference appearing on an electrode 1a provided adjacent to a resistance 2 chained with a contact hole provided between wiring metals by causing a constant through current to flow from an electrode 1b at both ends of a circuit through a diffused layer resistor 3 and polysilicon resistor 4. Namely, four-terminal resistance measurement is carried out. A voltage difference measured in this case means a voltage drop only by the resistance 2 chained with the contact hole between wiring metals and is free from influence of diffused resistor 3 and polysilicon resistor 4. Moreover, since no current flows into a voltmeter, voltage drop resulting from a contact resistance at the electrode 1a does not occur and a measured value is not affected by the contact resistance.

Inventors

• 👤 Akihiko Ebina
• 👤 昭彦 蝦名

Bibliographic Details