Apparatus for inspecting surface state

Abstract

Abstract PURPOSE:To estimate the inferiority mixing ratio of a group of objects to be inspected and to inspect the uniformity of the surface state thereof by obtaining a large number of adaptation coefficients F with respect to the successively inputted image data of the objects to be inspected to form the frequency distribution thereof and comparing the standard deviation thereof with the relation between preset standard deviation and an inferiority mixing ratio. CONSTITUTION:A large number of adaptation coefficients F corresponding to the difference between the density histograms to take image data and the theoretical frequencies of respective densities according to regular distribution having the mean value and standard deviation of the density histograms are calculated by operational processing carried out with respect to the image data of objects to be inspected successively inputted from an imaging apparatus to calculate the frequency distribution and standard deviation Fsigma thereof. The standard deviation Fsigma is compared with the relation between the standard deviation and inferiority mixing ratio preset corresponding to the surface states of the objects to be inspected of this time to estimate the inferiority mixing ratio of a group of the objects to be inspected to inspect the uniformity of the surface state of said group.

Inventors

• 👤 Yoichi Sato
• 👤 洋一 佐藤

Bibliographic Details