Inspection data analysis system

Abstract

Abstract PURPOSE:To grasp the attaching state of foreign matter and the generating state of appearance defects for each chip, by making each data analyzing station have chip arrangement information for each kind of article, and providing a function of deciding to which chip each appearance defect belongs. CONSTITUTION:In a clean room 13, the following are installed; an appearance inspection apparatus 1 having a function of measuring the number of appearance defects and coordinates thereof on a product wafer, an appearance inspection apparatus 4 having a function of measuring the number of appearance defects and coordinates thereof on a product wafer, and a function of recognizing the kind of the appearance defects, and a probe inspection apparatus 7 inspecting product characteristics of a chip. A foreign matter data analyzing station 2 and an appearance defect analyzing station 5 have, respectively, arrangement information of chips on a wafer for each kind of article, and are provided with a function of deciding, based on the coordinates of the detected appearance defect, to which chip it belongs, and a function of counting the number of appearance defects generating in each chip. Thereby data analysis for each chip is enabled.

Inventors

• 👤 Seiji Ishikawa
• 👤 誠二 石川
• 👤 Masao Sakata
• 👤 坂田　正雄
• 👤 Jun Nakazato
• 👤 中里　純
• 👤 Sadao Shimosha
• 👤 下社　貞夫
• 👤 Hiroto Nagatomo
• 👤 長友　宏人
• 👤 Yuzo Taniguchi
• 👤 雄三 谷口
• 👤 Osamu Sato
• 👤 修 佐藤
• 👤 Tsutomu Okabe
• 👤 勉 岡部
• 👤 Yuzaburo Sakamoto
• 👤 坂本　雄三郎
• 👤 Kimio Muramatsu
• 👤 村松　公夫
• 👤 Kazuhiko Matsuoka
• 👤 松岡　一彦
• 👤 Taizo Hashimoto
• 👤 橋本　泰造
• 👤 Yuichi Oyama
• 👤 大山　祐一
• 👤 Yutaka Ebara
• 👤 江原　裕
• 👤 Isao Miyazaki
• 👤 功 宮崎
• 👤 Shuichi Hanajima
• 👤 花島　秀一

Bibliographic Details