Production of optical waveguide

Abstract

Abstract PURPOSE:To rapidly form an optical waveguide by forming a 2nd thin film contg. the anions which are easily reactive with the 1st cation contained in a transparent substrate on the rear surface of the transparent substrate and impressing an electric field to the transparent substrate with this thin film as a cathode. CONSTITUTION:A metallic mask 4 formed on the surface of the glass substrate 1 contg. the 1st cations 3 is partly removed to form an exposed pattern 41. The 1st thin film 11a contg. the 2nd cations 61a formed thereon and further, a 1st protective film 12 in common use as an electrode is formed thereon. The 2nd thin film 13 contg. the anions which are liable to react with the 1st cations 3 is formed on the rear surface of the substrate 1 and a 2nd protective film 14 is provided thereon. An anode electrode 9 is connected to the 1st protective film 12 and a cathode electrode 10 is connected to the 2nd protective film 14. The 2nd cations 61a are smoothly and rapidly diffused and transferred into the substrate 1 and the optical waveguide 2a is formed when the electric field is impressed into the substrate 1. The 1st cations 3 moved to the cathode side react with the 2nd thin film 13 and are partly released from the inside of the substrate 1.

Inventors

• 👤 Osamu Maruyama
• 👤 修 丸山
• 👤 Hiroshi Aoki
• 👤 宏 青木

Bibliographic Details