Probe apparatus

Abstract

Abstract PURPOSE:To prevent a probe card from being damaged artificially by a method wherein a required card is selected automatically out of many probe cards, the probe card is conveyed automatically to a probe-card loading part and is loaded automatically on the probe-card loading part. CONSTITUTION:A probe card inside a probe-card storage warehouse 1 is carried out from an entrance and exist 3 by using a controller 2. The carried-out probe card is conveyed to a loading stage 5 by using a conveyance device 4. A belt, air or the like is used for the conveyance device. The probe card which has been conveyed to the loading stage 5 is aligned by using a sensor or the like; it is then set on a motherboard 6 and can be used. Thereby, it is possible to prevent the probe card from being damaged artificially.

Inventors

• 👤 Takanori Ishii
• 👤 孝徳 石井

Bibliographic Details