Scan type microscope device

Abstract

Abstract PURPOSE:To reduce a decrease in resolving power and image distortion due to the influence of stray light and to make a fast display by irradiating an area of a sample with a light beam by scanning, extracting only a signal from a corresponding photodetector and obtaining intermittent image information, and performing scanning operation plural times and putting plural pieces of intermittent image information together. CONSTITUTION:The light beam 22 is made to scan and irradiate the area of the previously set sample 29 selectively, only the signal from a photodetector corresponding to the irradiation position of this light beam 22 is extracted to obtain the intermittent image information, and pieces of intermittent image information obtained by performing the scanning operation plural time are put together to obtain an image of the sample 29. The sample 29 is scanned with the scanning light beam 22 in a direction (X direction) corresponding to the photoelectric converting element array of a linear image sensor 31 by an AOD 24 which is able to scan at high speed and at right angles (Y direction) through a vibrating mirror 27. Consequently, the decrease in the resolving power and image distortion due to the influence of stray light are reduced and the fast display can be made.

Inventors

• 👤 Satoru Osawa
• 👤 哲 大沢

Bibliographic Details