Blowoff-type surface treating device

Abstract

Abstract PURPOSE:To carry out plasma surface treatment over a large area by introducing a gaseous reactant into a cylindrical discharge space formed between a high voltage electrode and a grounded electrode, exciting the reactant with plasma by an electric discharge under atmospheric pressure and injecting the excited reactant on the surface of a material to be treated. CONSTITUTION:A cylindrical discharge space 6 is formed between a grounded electrode 4 and a high voltage electrode 3 obtained by coating its electrode surface with a dielectric 5 or opposing the dielectric to the surface. One or plural discharge spaces 6 are arranged to constitute a cylindrical discharge part 2. A gaseous monomer corresponding to the film forming species or a gas for plasma corresponding to treatment and an inert gas are introduced from feed pipes 8 and 9 through the gas inlet pipe 7 of a double pipe from the upstream side of the discharge part 2. The gases are mixed in the space 6 to form a gaseous reactant. A high voltage is then impressed between the electrodes 3 and 4 to generate a glow discharge or a silent discharge. The gaseous reactant passing through the space 6 is excited with plasma approximately at atmospheric pressure. The plasma is injected on the surface of a material to be treated from the end of the discharge part 2 on the downstream side, As a result, a thin film is formed over a large area under atmospheric pressure, and surface treatment such as surface reforming is carried out.

Inventors

• 👤 Sachiko Okazaki
• 👤 幸子 岡崎
• 👤 Masuhiro Kokoma
• 👤 益弘 小駒
• 👤 Masahiro Hirakawa
• 👤 雅弘 平川
• 👤 Yasuhiro Horiike
• 👤 靖浩 堀池

Bibliographic Details