Infrared sensor and its manufacture

Abstract

Abstract PURPOSE:To improve measuring accuracy by integrating an infrared sensor element and a window material and compensating an output of the infrared sensor element based on a detection result of a pressure detecting means which detects a pressure inside a cavity. CONSTITUTION:Infrared rays emitted from a sample to be measured are introduced into a cavity 13 via an infrared ray input unit 18 of a window material 14 and made incident to an infrared sensor element 12 where they are converted into an electric signal to be output to have a measured value obtained. A pressure detecting means for detecting a pressure in the cavity 13 is provided while an output of the infrared sensor element 12 is compensated based on a detection result of the pressure detecting means. The pressure detecting means is a diffusion resistor layer 17 formed on the infrared ray input unit 18 to set the cavity 13 at a negative pressure. That is, a value of an output signal of the infrared sensor element 12 is compensated according to a change in an inner pressure.

Inventors

• 👤 Akinobu Satou
• 👤 佐藤　倬暢
• 👤 Takanao Suzuki
• 👤 孝直 鈴木

Bibliographic Details