Magnetron sputtering device

Abstract

Abstract PURPOSE:To improve the use efficiency of a target by providing plural non- annular magnetic polar bodies to the inside of an annular magnetic polar body, winding independent exciting coils round respective magnetic polar bodies mentioned above, and controlling respective electric currents of these exciting coils so that plasma region is made uniform. CONSTITUTION:A first central magnetic polar body 2 and a second central magnetic polar body 3, both having non-annular shapes, are provided to the inside of an annular magnetic polar body 1, and exciting coils 1a, 1b, 2a, 3a are disposed. Electric currents of about 5Hz are sent to respective exciting coils mentioned above. First, electric currents are sent to the exciting coils 1a, 1b so that the upper end of the annular magnetic polar body 1 becomes the south pole. In the above state, electric currents (o), (p) are sent to the exciting coils 2a, 3a, respectively, so that the first central magnetic polar body 2 and the second magnetic polar body 3 become the north pole and the south pole, respectively. Respective polarities of the first central magnetic polar body 2 and the second central magnetic polar body 3 are changed with the lapse of time, by which the position of plasma is changed. By this method, the use efficiency of a target can be improved.

Inventors

• 👤 Kyuzo Nakamura
• 👤 久三 中村
• 👤 Yoshifumi Ota
• 👤 太田　賀文
• 👤 Michio Ishikawa
• 👤 道夫 石川
• 👤 Noriaki Tani
• 👤 典明 谷
• 👤 Yukinori Hashimoto
• 👤 征典 橋本

Bibliographic Details