Mechanism for aligning minute position of piezoelectric element

Abstract

Abstract PURPOSE:To make it possible to align a position minutely at a high speed by applying voltages to the electrodes at the inner side and at the outer side of a piezoelectric element body, deforming a tubular piezoelectric element body, and positioning a detecting part or a specimen which is attached to the tip of the tubular piezoelectric element body. CONSTITUTION:In a piezoelectric element body 1, electrodes x1 and x2 for the operation along an (x) axis and electrodes y1 and y2 for the operation along a (y) axis are constituted on the facing outer surfaces of the square column of a tubular piezoelectric element body whose four outer surfaces are cut. An electrode (z) for the operation along a (z) axis which is common to each surface is provided. The electrode (z) is operated along the axis that is in parallel with the axial direction of the tube and along the axis which is perpendicular to the axial direction of the tube. When a positive or negative voltage is applied to the inner electrode, the piezoelectric element body is deformed in the direction of the thickness. As a result, deformation is generated in the direction of the (z) axis. When the operation is performed in one direction of the (x) axis, a positive voltage is applied to the inner electrode of one of the facing electrodes x1 and x2, and a negative voltage is applied to the other side. In this way, the minute positioning of the piezoelectric element which is sufficiently useful for aligning the position between a specimen for a scanning type tunnel microscope and a detecting prove can be performed.

Inventors

• 👤 Hiroshi Bando
• 👤 寛 阪東
• 👤 Hiroshi Tokumoto
• 👤 洋志 徳本
• 👤 Shigeru Wakiyama
• 👤 茂 脇山
• 👤 Kenji Omura
• 👤 大村　研二

Bibliographic Details