Manufacturing method of Josephson element

Abstract

Abstract PURPOSE:To obtain the desired number of Josephson elements at desired positions on a board by forming pairs of nucleuses which are to become growth starting points of superconductive crystals in desired patterns on the board, forming grain boundaries by the selective formation of the superconductive crystals and the progress of crystallization, thereby forming Josephson junctions. CONSTITUTION:The desired number of nucleuses 1 which form pairs are formed at the desired position on a board 2. At least two nucleuses form one pair which will become the starting point of the growth of superconductive crystals. Then, the constituent component of the superconductive crystal is sputtered, and the superconductive crystal 4 is formed. Under ordinary conditions, the crystal starts growing from the individual nucleus. The crystals substantially collide at the desired position, and a Josephson junction is obtained. The superconductive crystal is etched by reactive etching wherein difference in etching speeds is generated between the board and the superconductive crystal. The surface comprising the single crystal, the grain boundary and the single crystal is flattened. Wirings are applied on the single-crystal parts. Thereafter, a protecting film 5 is provided on the entire surface. In this way, the desired number of the Josephson elements can be fabricated at the desired positions on the board 2.

Inventors

• 👤 Yuji Kasanuki
• 👤 有二 笠貫
• 👤 Keisuke Yamamoto
• 👤 敬介 山本
• 👤 Kiyozumi Niitsuma
• 👤 清純 新妻

Bibliographic Details