Pellicle

Abstract

Abstract PURPOSE:To obtain the pellicle which has an excellent ray transmittance and is prevented of electrostatic charge by using a specific fluorine polymer having an electrical conductivity for an antireflection layer. CONSTITUTION:The pellicle has an optical thin-film body 1 and a base 2 which has this film body on one side via an adhesive layer 3 and has a tacky adhesive agent layer 4 on the end face on the side opposite thereto. The optical thin-film body 1 has the perfluoroinated polymer contg. the ionic functional group expressed by formula -SO3M (M is H, Na, K or NR4 and further R is H, lower alkyl group) in the molecule on at least one surface as the antireflection layer. The pellicle which has the high ray transmittance, is lowered in the electric resistance on the surface of the thin film and is prevented of electrostatic charge is obtd. in this way.

Inventors

• 👤 Takeki Matsui
• 👤 雄毅 松居
• 👤 Yasushi Kaneko
• 👤 靖 金子
• 👤 Mitsunobu Fukumoto
• 👤 福本　光伸

Bibliographic Details