Continuous production of aluminum nitride powder and apparatus therefor

Abstract

Abstract PURPOSE:To provide the title production method intended for increasing AlN powder, so designed that Al powder is allowed to fall into a tube where a N2 gas is flowing downward, a nitrification is made at a heating reaction part on the way, and the resultant AlN powder is carried together with a N2 gas stream into a collection part. CONSTITUTION:Al powder 15 ca.30-50mum in size is fed through an Al powder feed port 5 and allowed to fall in a suspended state together with a carrier N2 gas through a tube 1. When said powder passes through a heating reaction part 3, it is heated to ca.1600 deg.C by a heating device 2 and nitrified. In the initial stage of the nitrification, the Al powder is nitrified on its surface alone to form a hard AlN film, and during said powder falls through the heating reaction part 3, continuous nitrification occurs, effecting completion of the nitrification, and at the same time, the resultant AlN powder 13 becomes finer. The AlN powder falls together with the carrier N2 gas at a velocity of ca.5-200mm/sec, is carried into an AlN powder-carrying tube 8 and collected into an AlN powder collection vessel 10. Unreacted Al powder 15, crossing over the flow of a separating N2 gas, is deposited on a unreacted Al powder collection part 12.

Inventors

• 👤 Koichiro Fukui
• 👤 福井　紘一郎
• 👤 Yuichi Furukawa
• 👤 裕一 古川

Bibliographic Details