Patent JPH02228035A successfully refreshed from Google Patents.
JPH02228035A
Expired / Lapsed
JP
⏱️ 0.0 years remaining
Vacuum processing equipment
Assignee: Hitachi Ltd
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Filing: 1989-03-01
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Granted: —
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Expires: 2009-03-01
Abstract
Abstract Translated from Japanese (57)【要約】本公報は電子出願前の出願データであるた め要約のデータは記録されません。 (57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.
Inventors
- 👤 Seiichi Watanabe
- 👤 成一 渡辺
- 👤 Yutaka Kakehi
- 👤 掛樋 豊
- 👤 Masakuni Akiba
- 👤 秋葉 政邦
- 👤 Yoshinao Kawasaki
- 👤 義直 川崎
Bibliographic Details
Application Number
—
Jurisdiction
JP
Data Source
google_patents
Last Synchronized
2026-11-09 08:15
CPC Classifications
—
Claims Analysis
Total Claims: 0
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References Cited (Backward Citations)
JPS60223125A
Cited
JPS63283024A
Cited
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