Fine foreign matter inspecting device

Abstract

Abstract PURPOSE:To enable judgement of the presence of a fine foreign matter and an organic substance on a planar substrate by detecting a scattered light attributed to a spot light and fluorescence attributed to an excitation light. CONSTITUTION:A first lighting means converts a light beam 2 generated from a semiconductor laser 16 in a ring with an optical element 19 to irradiate a planar substrate 29 in a spot from a direction of 360 deg. with a specified incident angle. A second lighting means irradiates the substrate 29 with an excitation light generated from a mercury lamp 15 from a vertical way overlapping a spot irradiation position. Then, a scanning means 30 moves with the substrate thereon to scan the substrate 29 two-dimensionally by a spot light. Here, scattered light 10 by the spot light and a fluorescence 7 by the excitation light 1 are separated in terms of wavelengths to reach photoelectric elements 26 and 27. Thus, a computing means 28 can judge the presence of a fine foreign matter 8 on the substrate from a photoelectric conversion signal of the scattered light and the presence of an organic substance on the substrate 29 from a photoelectric conversion signal of the fluorescence 7 to display.

Inventors

• 👤 Hiroyuki Matsushiro
• 👤 松代　弘之

Bibliographic Details