Scanning tunnel electron microscope

Abstract

Abstract PURPOSE:To expand the observing area on the surface of a sample and, at the same time, to accurately measure the fine structure of the sample surface by two- dimensionally and finely displacing a sample holding table in a horizontal plane as bimorph type piezoelectric elements are displaced. CONSTITUTION:A table driving mechanism 5 is formed of a finely moving mechanism 8 composed of an X- and Y-direction finely moving mechanisms 9 and 10 which respectively move a sample holding table 4 two-dimensionally and finely in X- and Y- directions perpendicular to each other in a horizontal plane as bimorph type piezo-electric elements 12a, 12b, 13a, and 13b are displaced. In addition, a roughly moving mechanism 24 composed of an X- and Y-direction roughly moving mechanisms 25 and 26 which respectively move the table 4 roughly in the X- and Y-directions in coincident with the moving directions of the mechanism 8 with larger displacing quantities than those of the mechanism 8 is provided. Then the observing area on the surface of a sample is expanded by means of the mechanism 24 and, at the same time, the fine structure of the sample surface is accurately measured by using the mechanism 8. Moreover, by driving a probe 29 along the vertical direction, limitation to the size of samples mounted on the sample holding surface of the table 4 is eased.

Inventors

• 👤 Nobuhiro Tsuda
• 👤 津田　展宏
• 👤 Takafumi Yamada
• 👤 啓文 山田
• 👤 Fumihiko Ishida
• 👤 文彦 石田
• 👤 Masakazu Hayashi
• 👤 正和 林
• 👤 Tamiyoshi Yasunaga
• 👤 安永　民好
• 👤 Junzo Uchida
• 👤 内田　順三

Bibliographic Details