Patent JP4126461B2 successfully refreshed from Google Patents.
JP4126461B2
Expired / Lapsed
JP
⏱️ 0.0 years remaining
Components for plasma process equipment
Assignee: Kyocera Corp
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Filing: 2004-10-18
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Granted: 2008-07-30
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Expires: 2024-10-18
Abstract
No abstract record available.
Inventors
- 👤 裕見子 伊東
- 👤 比呂史 会田
Bibliographic Details
Application Number
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Jurisdiction
JP
Data Source
google_patents
Last Synchronized
2026-11-09 11:08
CPC Classifications
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