Patent EP1047189A2 successfully refreshed from Google Patents.
EP1047189A2
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Piezoelectric resonator
Assignee: Murata Manufacturing Co Ltd
•
Filing: 2000-04-12
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Granted: —
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Expires: 2020-04-12
Abstract
Abstract A piezoelectric resonator using a thickness extensional vibration mode, comprises a vibrator portion (10a) made up of two or more layers of piezoelectric thin-films (1, 2, ..., n) where the piezoelectric thin-films (1, 2, ..., n) and a plurality of insulating thin films (12) are alternately laminated. An alternating voltage is independently applied to each layer of the piezoelectric thin-films (1, ..., n) for a higher-order vibration mode to be dominantly excited.
Inventors
- 👤 Akihiko Shibata
Bibliographic Details
Application Number
—
Jurisdiction
EP
Data Source
google_patents
Last Synchronized
2026-11-07 16:43
CPC Classifications
H; H03; H03H; H03H9/00; H03H9/02; H03H9/02007; H03H9/02015; H03H3/00; H03H3/007; H03H3/02; H03H9/15; H03H9/17; H03H9/178; H03H9/02062; H03H9/02078; H03H9/02086; H03H9/171; H03H9/02094; H03H9/172; H03H9/173; H03H9/174
Claims Analysis
Total Claims: 32
Claim 1
Independent Claim
124 words
A piezoelectric resonator using a thickness
extensional vibration mode, the piezoelectric resonator
comprising a vibrator portion (10a; 20a; 30a) made up of n
layers of piezoelectric thin-film (1, 2, ..., n; 1a, 2a; 1b,
2b, 3b), n being an integer greater of equal to 2, each of the
piezoelectric thin-film layers (1, ..., n; 1a, 2a; 1b - 3b)
being separated by a respective insulating thin-film layer
(12; 13; 14), the distance d of the nth piezoelectric thin-film
layer (n) from a first side of the vibrator portion (10a;
20a; 30a), being determined by the formula d = t(2m - 1)/2n wherein t is the thickness of the vibrator portion (10a; 20a;
30a) and m is an integer less than or equal to n.
Claim 2
Dependent Claim
38 words
A piezoelectric resonator as claimed in claim 1,
wherein each of the piezoelectric thin-film layers (1, ..., n;
1a, 2a; 1b - 3b) comprises a generally planar piezoelectric
thin-film having electrodes (e1, e2) formed on opposite sides
thereof.
Claim 3
Dependent Claim
42 words
A piezoelectric resonator as claimed in claim 2,
wherein each of the piezoelectric thin-film layers (1, ..., n;
1a, 2a, 1b - 3b) and each of the insulating thin-film layers
(12; 13; 14) are generally planar and extend parallel to one
another.
Claim 4
Dependent Claim
50 words
A piezoelectric resonator as claimed in claim 2 or 3,
wherein the piezoelectric thin-films (1, ..., n; 1a, 2a; 1b -
3b) and the insulating thin film layers (12; 13; 14) are made
up of materials having temperature coefficients of the elastic
constant whose sign is opposite to one another.
Claim 5
Dependent Claim
31 words
A piezoelectric resonator as claimed in any of claims
1 to 4, wherein adjacent piezoelectric thin-film layers (1,
..., n; 1a, 2a; 1b - 3b) are polarized in the same direction.
Claim 6
Dependent Claim
29 words
A piezoelectric resonator as claimed in any of claims
1 to 4, wherein adjacent piezoelectric thin-films (1, ..., n;
1a, 2a; 1b - 3b) are polarized in opposite directions.
Claim 7
Dependent Claim
32 words
A piezoelectric resonator as claimed in claim 1,
wherein the thickness t is equal to one half of the wave
length of the first resonance wavelength of the thickness
extension vibration mode.
Claim 8
Dependent Claim
113 words
The combination of a piezoelectric resonator and a
voltage source, the combination comprising: a piezoelectric resonator using a thickness extensional
vibration mode, the piezoelectric resonator comprising a
vibrator portion (10a; 20a; 30a) made up of n layers of
piezoelectric thin-film (1, ..., n; 1a, 2a; 1b - 3b), n being
an integer greater of equal to 2, each of the piezoelectric
thin-film layers (1, ..., n; 1a, 2a; 1b - 3b) being separated
by a respective insulating thin-film layer (12; 13; 14); and a voltage source for applying alternating voltages to the
piezoelectric resonator in such a manner that the predominant
vibration mode excited in the piezoelectric resonator is a
higher-order vibration mode.
Claim 9
Dependent Claim
28 words
The combination according to claim 8, wherein the
alternating voltages are independently applied to each of the
piezoelectric thin-film layers (1, ..., n; 1a, 2a; 1b - 3b).
Claim 10
Dependent Claim
17 words
The combination of claim 8 or 9, wherein the higher-order
vibration mode is the nth vibration mode.
Claim 11
Dependent Claim
60 words
The combination of claim 10, wherein the distance d
of the nth piezoelectric thin-film layer (n) from a first side
of the vibrator portion (10a; 20a; 30a) is determined by the
formula d = t(2m - 1)/2n wherein t is the thickness of the vibrator portion (10a; 20a;
30a) and m is an integer less than or equal to n.
Claim 12
Dependent Claim
35 words
The combination of claim 11, wherein each of the
piezoelectric thin-film layers (1, ..., n; 1a, 2a; 1b - 3b)
comprises a generally planar piezoelectric thin-film having
electrodes (e1, e2) formed on opposite sides thereof.
Claim 13
Dependent Claim
39 words
The combination of claim 12 wherein each of the
piezoelectric thin-film layers (1, ..., n; 1a, 2a; 1b - 3b)
and each of the insulating thin-film layers (12; 13; 14) are
generally planar and extend parallel to one another.
Claim 14
Dependent Claim
45 words
The combination of claim 13, wherein the
piezoelectric thin-films (1, ..., n; 1a, 2a; 1b - 3b) and the
insulating thin film layers (12; 13; 14) are made up of
materials having temperature coefficients of the elastic
constant whose sign is opposite to one another.
Claim 15
Dependent Claim
52 words
The combination of any of claims 8 to 14, wherein
adjacent piezoelectric thin-film layers (1, ..., n; 1a, 2a; 1b
- 3b) are polarized in the same direction and the voltage
source applies alternating voltages of the opposite phase to
adjacent piezoelectric thin-film layers (1, ..., n; 1a, 2a; 1b
- 3b).
Claim 16
Dependent Claim
53 words
The combination of any of claims 8 to 14 wherein
adjacent piezoelectric thin-film layers (1, ..., n; 1a, 2a; 1b
- 3b) are polarized in opposite directions and the voltage
source applies alternating voltages of the same phase to each
of the piezoelectric thin-film layers (1, ..., n; 1a, 2a; 1b -
3b).
Claim 17
Dependent Claim
45 words
The combination of any of claims 8 to 16, wherein
the voltage source applies alternating voltages to the
piezoelectric thin-film layers (1, ..., n; 1a, 2a; 1b - 3b) in
such a manner that vibrations of opposite phase are induced in
adjacent piezoelectric thin-film layers.
Claim 18
Dependent Claim
33 words
The combination of any of claims 11 to 17, wherein
the thickness t is equal to one half of the wave length of the
first resonance wavelength of the thickness extension
vibration mode.
Claim 19
Independent Claim
112 words
A method for exciting a piezoelectric resonator in a
thickness extensional vibration mode, the piezoelectric
resonator comprising a vibrator portion (10a; 20a; 30a) made
up of n layers of piezoelectric thin-film (1, ..., n; 1a, 2a;
1b - 3b), n being an integer greater of equal to 2, each of
the piezoelectric thin-film layers (1, ..., n; 1a, 2a; 1b -
3b) being separated by a respective insulating thin-film layer
(12; 13; 14), the method comprising: applying alternating voltages to the piezoelectric thin
film layers (1, ..., n; 1a, 2a; 1b - 3b) in such a manner that
the predominant vibration mode excited in the piezoelectric
resonator is a higher-order vibration mode.
Claim 20
Dependent Claim
27 words
The method of claim 19, wherein the alternating
voltages are independently applied to each of the
piezoelectric thin-film layers (1, ..., n; 1a, 2a; 1b - 3b).
Claim 21
Dependent Claim
15 words
The method of claim 19, wherein the higher-order
vibration mode is the nth vibration mode.
Claim 22
Dependent Claim
64 words
The method of claim 21, wherein the distance d of
the nth piezoelectric thin-film layer (1, ..., n; 1a, 2a; 1b -
3b) from a first side of the vibrator portion is determined by
the formula d = t(2m - 1)/2n wherein t is the thickness of the vibrator portion (10a; 20a;
30a) and m is an integer less than or equal to n.
Claim 23
Dependent Claim
35 words
The method of claim 22, wherein each of the
piezoelectric thin-film layers (1, ..., n; 1a, 2a; 1b - 3b)
comprises a generally planar piezoelectric thin-film having
electrodes (e1, e2) formed on opposite sides thereof.
Claim 24
Dependent Claim
39 words
The method of claim 23 wherein each of the
piezoelectric thin-film layers (1, ..., n; 1a, 2a; 1b - 3b)
and each of the insulating thin-film layers (12; 13; 14) are
generally planar and extend parallel to one another.
Claim 25
Dependent Claim
45 words
The method of claim 24, wherein the piezoelectric
thin-films (1, ..., n; 1a, 2a; 1b - 3b) and the insulating
thin film layers (12; 13; 14) are made up of materials having
temperature coefficients of the elastic constant whose sign is
opposite to one another.
Claim 26
Independent Claim
50 words
The method of any of claims 19 to 25, wherein
adjacent piezoelectric thin-film layers (1, ..., n; 1a, 2a; 1b
- 3b) are polarized in the same direction and alternating
voltages of the opposite phase are applied to adjacent
piezoelectric thin-film layers (1, ..., n; 1a, 2a; 1b - 3b).
Claim 27
Independent Claim
51 words
The method of any of claims 19 to 25, wherein
adjacent piezoelectric thin-film layers (1, ..., n; 1a, 2a; 1b
- 3b) are polarized in opposite directions and alternating
voltages of the same phase are applied to each of the
piezoelectric thin-film layers (1, ..., n; 1a, 2a; 1b - 3b).
Claim 28
Independent Claim
51 words
The method of any of claims 19 to 27, wherein
alternating voltages are applied to the piezoelectric thin-film
layers (1, ..., n; 1a, 2a; 1b - 3b) in such a manner that
vibrations of opposite phase are induced in adjacent
piezoelectric thin-film layers (1, ..., n; 1a, 2a; 1b - 3b).
Claim 29
Independent Claim
33 words
The method of any of claims 22 to 28, wherein the
thickness t is equal to one half of the wave length of the
first resonance wavelength of the thickness extension
vibration mode.
Claim 30
Dependent Claim
62 words
The piezoelectric vibrator according to any of
claims 1 to 7, wherein the distance d of each piezoelectric
thin-film layer (1, ..., n; 1a, 2a; 1b - 3b) from the first
side of the vibrator portion (10a; 20a; 30a) is measured at
the center of the piezoelectric thin-film layer (1, ..., n;
1a, 2a; 1b - 3b) in the thickness direction thereof.
Claim 31
Dependent Claim
60 words
The combination of any of claims 11 to 18, wherein
the distance d of each piezoelectric thin-film layer (1, ...,
n; 1a, 2a; 1b - 3b) from the first side of the vibrator
portion (10a; 20a; 30a) is measured at the center of the
piezoelectric thin-film layer (1, ..., n; 1a, 2a; 1b - 3b) in
the thickness direction thereof.
Claim 32
Independent Claim
60 words
The method of any of claims 20 to 29, wherein the
distance d of each piezoelectric thin-film layer (1, ..., n;
1a, 2a; 1b - 3b) from the first side of the vibrator portion
(10a; 20a; 30a) is measured at the center of the piezoelectric
thin-film layer (1, ..., n; 1a, 2a; 1b - 3b) in the thickness
direction thereof.
References Cited (Backward Citations)
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