Patent EP0960693A2 successfully refreshed from Google Patents.
EP0960693A2
Expired / Lapsed
EP
⏱️ 0.0 years remaining
A polishing machine
Assignee: SpeedFam Co Ltd
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Filing: 1999-05-25
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Granted: —
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Expires: 2019-05-25
Abstract
Abstract The present invention is a polishing machine, comprising a rotatable metallic platen whose surface is covered by the plural number of polishing pad, on the position of the surface of said metallic platen corresponding to the jointing lines of said polishing pads, the grooves are engraved, and the filling material which is different from the material composing the platen is inserted into said grooves. The desirable substance to be inserted into said grooves is stainless steel, synthetic resin or ceramics. <IMAGE>
Inventors
- 👤 Hitoshi c/o Speedfam Co. Ltd. Nagayama
Bibliographic Details
Application Number
—
Jurisdiction
EP
Data Source
google_patents
Last Synchronized
2026-11-07 04:23
CPC Classifications
B; B24; B24B; B24B37/00; B24B37/11; B24B37/12; B24B37/16; B24B37/20; B24B37/26; B24B41/00; B24B41/04; B24B41/047
Claims Analysis
Total Claims: 2
Claim 1
Independent Claim
60 words
A polishing machine, comprising a rotatable metallic platen whose surface
is covered by the plural number of polishing pad, on the position of the surface of
said metallic platen corresponding to the jointing lines of said polishing pads, the
grooves are engraved, and the filling material which is different from the material
composing the platen is inserted into said grooves.
Claim 2
Dependent Claim
36 words
The polishing machine of claim 1, wherein the substance to be inserted
into said grooves engraved on said metallic platen is at least one selected from the
group composed by stainless steel, synthetic resin and ceramics.
References Cited (Backward Citations)
No citation records indexed.
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