EP0887433A1
Expired / Lapsed
EP
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Silicon dioxide deposition by plasma activated evaporation process
Assignee: SABIC Global Technologies BV
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Filing: 1998-06-26
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Granted: —
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Expires: 2018-06-26
Abstract
Abstract A plasma activated reactive deposition process is used to deposit silicon oxide scratch resistant coatings on various substrates. The process comprises evaporating silicon or silicon oxide into an argon and nitrous oxide plasma which is directed to the surface to be coated
Inventors
- 👤 Charles Dominic Iacovangelo
Bibliographic Details
Application Number
—
Jurisdiction
EP
Data Source
google_patents
Last Synchronized
2026-11-09 18:43
CPC Classifications
C; C23; C23C; C23C14/00; C23C14/06; C23C14/10; C23C14/22; C23C14/24; C23C14/32
Claims Analysis
Total Claims: 8
Claim 1
Independent Claim
31 words
A method for deposition of an abrasion resistant coating on a polycarbonate substrate by plasma enhanced reactive evaporation of silica in the presence of nitrous oxide introduced into the plasma region.
Claim 2
Dependent Claim
97 words
A method according to claim 1 for coating a plastic substrate with an abrasion resistant metal oxide layer which comprises placing the plastic substrate in a vacuum chamber, forming a vacuum in the chamber, depositing the abrasion resistant layer by plasma enhanced reactive evaporation of an oxide-forming metal or a metal oxide by electron beam evaporation in the vacuum chamber, passing the evaporated metal or metal oxide into an argon plasma containing oxygen and nitrous oxide, exposing the plastic substrate to the plasma whereby the abrasion resistant layer is deposited on the exposed surface of the substrate.
Claim 3
Dependent Claim
19 words
A method according to claim 2 in which the plasma contains oxygen, nitrous oxide, and a reactive organosilicon monomer.
Claim 4
Dependent Claim
22 words
A method according to claim 3 in which the reactive monomer is selected from the group consisting of silanes, siloxanes, and silazanes.
Claim 5
Dependent Claim
19 words
A method according to claim 2, 3 or 4 in which the oxid-forming metal is silicon, titanium, or aluminum
Claim 6
Independent Claim
19 words
A method according to any one of claims 2 to 5 in which the plastic substrate is a polycarbonate.
Claim 7
Independent Claim
22 words
A method according to any one of claims 2 to 6 in which the metal oxide evaporated into the plasma is silica.
Claim 8
Dependent Claim
20 words
A method according to claim 5 in which the organosilicon compound is tetramethyldisiloxane, hexamethyldisiloxane, tetraethyl orthosilicate, hexamethyldisilane, octamethylcyclotetrasiloxane or tetramethylcyclotetrasiloxane.
References Cited (Backward Citations)
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