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Patent EP0790681A2 successfully refreshed from Google Patents.
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EP0790681A2 Expired / Lapsed EP ⏱️ 0.0 years remaining

External high voltage control for a laser system

Assignee: Cymer Inc
•
Filing: 1997-01-20
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Granted: —
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Expires: 2017-01-20
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Abstract

Abstract An external control system (110) for a laser system, used as an illumination source for a stepper system, is provided. The external control (110) allows for a measuring of the energy actually distributed to a wafer and a correction of the energy dose distribution based upon this measurement. In this way, a more precise energy dose control is achieved. The external control (110) communicates with the laser's own internal control system to provide serial inputs which allow for corrections to be made to the High Voltage setting based upon the aforementioned measurements, and coordinates with the laser's internal control system to initiate laser operation at the required intervals.

Inventors

  • 👤 Palash P. Das
  • 👤 James D. Payne
  • 👤 Curtiss L. Mixon
  • 👤 Richard A. Eis

Bibliographic Details

Application Number —
Jurisdiction EP
Data Source google_patents
Last Synchronized 2026-10-26 14:05
CPC Classifications
H; H01; H01S; H01S3/00; H01S3/10; H01S3/13; H01S3/131; H01S3/134; H01S3/14; H01S3/22; H01S3/223; H01S3/225

Claims Analysis

Total Claims: 5
Claim 1
Independent Claim 124 words
A gas discharge control system for a laser comprising: an internal laser control system, said control system having at least one high speed, switch-selectable, serial port card; a high speed serial port operably coupled to said serial port card to allow energy control inputs from an external controller to the laser control system; a high voltage power supply to charge a charge-unit to a command voltage set by said external inputs; a laser trigger and timing means to cause said charge-unit to discharge across a pair of electrodes and initiate a laser pulse upon receipt of a trigger signal, said laser trigger and timing means operably coupled to said external controller to coordinate energy control inputs and laser trigger commands within a prescribed parameter.
Claim 2
Dependent Claim 20 words
The gas discharge control system of Claim 1 wherein the high speed, switch-selectable, serial port card is an SBX PCB.
Claim 3
Dependent Claim 18 words
The gas discharge control system of Claim 2 wherein the high speed serial port is an RS 485/422.
Claim 4
Dependent Claim 15 words
The gas discharge control system of Claim 3 wherein the charge unit is a capacitor.
Claim 5
Dependent Claim 23 words
The gas discharge control system of Claim 4 wherein the internal laser control system is a multiple CPU system on a common bus.

References Cited (Backward Citations)

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