Patent EP0757431A2 successfully refreshed from Google Patents.
EP0757431A2
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EP
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Machine structures fabricated of multiple microstructure layers
Assignee: International Business Machines Corp
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Filing: 1996-07-15
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Granted: —
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Expires: 2016-07-15
Abstract
Abstract Machine structures each comprising a stack of a plurality of micromachine layers laminated together are presented, along with fabrication methods therefore. Each machine structure includes a movable member(s) defined from microstructure of at least one layer of the plurality of micromachine layers comprising the stack. During fabrication, the micromachine layers are separately formed using VLSI techniques and then subsequently laminated together in a selected arrangement in the stack to define the machine structure.
Inventors
- 👤 Claude Louis Bertin
- 👤 John Edward Cronin
Bibliographic Details
Application Number
—
Jurisdiction
EP
Data Source
google_patents
Last Synchronized
2026-11-09 11:32
CPC Classifications
H; H01; H01H; H01H1/00; H01H1/0036; H02; H02N; H02N1/00; H02N1/002; H02N1/004
Claims Analysis
Total Claims: 26
Claim 1
Independent Claim
33 words
A machine comprising a stack structure of a plurality of layers laminated together, said stack structure including a movable member defined from microstructure of at least one layer of said plurality of layers.
Claim 2
Dependent Claim
55 words
A machine as claimed in claim 1, wherein said at least one layer containing said microstructure defining said movable member comprises multiple layers of said plurality of layers, each layer of said multiple layers comprising a micromachine layer, said micromachine layers being adjacently disposed within said stack structure so as to define said movable member.
Claim 3
Dependent Claim
19 words
A machine as claimed in claim 1, wherein at least some layers of said plurality of layers are identical.
Claim 4
Dependent Claim
19 words
A machine as claimed in claim 1, wherein at least some layers of said plurality of layers are different.
Claim 5
Dependent Claim
21 words
A machine as claimed in claim 1, wherein each layer of said plurality of layers at least partially comprises stationary structure.
Claim 6
Dependent Claim
19 words
A machine as claimed in claim 1, wherein each layer of said plurality of layers comprises a silicon substrate.
Claim 7
Dependent Claim
61 words
An electrostatic machine comprising: a monolithic structure comprising a plurality of layers laminated together in a stack, said monolithic structure having a stator structure, and a movable member positioned for movement relative to the stator structure, free of contact therewith, said movable member being defined from microstructure of at least one micromachine layer comprising a layer of said plurality of layers.
Claim 8
Dependent Claim
35 words
A machine as claimed in claim 7, wherein said stator structure and said movable member are each defined from microstructure of multiple micromachine layers, each micromachine layer comprising a layer of said plurality of layers.
Claim 9
Dependent Claim
43 words
A machine as claimed in claim 7, wherein said plurality of layers includes two endcap layers, each endcap layer being disposed at a different end of said monolithic structure, said endcap layers being configured to retain said movable member within said monolithic structure.
Claim 10
Dependent Claim
23 words
A machine as claimed in claim 9, wherein said electrostatic machine comprises an electrostatic motor and wherein said movable member comprises a rotor.
Claim 11
Dependent Claim
26 words
A machine as claimed in claim 10, wherein at least one endcap layer of said two endcap layers includes an electrical contact to said stator structure.
Claim 12
Dependent Claim
20 words
A machine as claimed in claim 10, wherein said monolithic structure further comprises a hub about which said rotor rotates.
Claim 13
Dependent Claim
58 words
A machine as claimed in claim 10, wherein said monolithic structure further comprises a hub connected to said rotor so as to rotate therewith, and wherein at least one endcap layer of said two endcap layers includes a movable structure connected to said hub so as to rotate therewith and drive a structure external to the electrostatic machine.
Claim 14
Dependent Claim
40 words
A machine as claimed in claim 7, wherein said movable member is defined from microstructure of at least two micromachine layers which comprise layers of said plurality of layers, said microstructure of said at least two micromachine layers being unconnected.
Claim 15
Dependent Claim
22 words
A machine as claimed in claim 7, wherein at least some layers of said plurality of layers each comprise a silicon substrate.
Claim 16
Independent Claim
133 words
A method for fabricating a machine comprising the steps of: (a) providing a plurality of substrates; (b) forming at least one opening in at least one substrate, said at least one opening defining structures in said at least one substrate; (c) filling at least some of said at least one opening in said at least one substrate with a sacrificial material for temporarily securing together selected structures defined and separated by said at least one opening; (d) stacking said plurality of substrates together in a selected arrangement to form a stack structure; and (e) removing said sacrificial material from said at least one opening, such that said structures defined in said at least one substrate by said at least one opening form a movable member within said stack structure, thereby forming said machine.
Claim 17
Dependent Claim
60 words
A method as claimed in claim 16, wherein said forming step (b) comprises forming said at least one opening in multiple substrates of said plurality of substrates provided in said step (a) such that upon stacking of said plurality of substrates in said selected arrangement, structures defined within said multiple substrates together define said movable member within said stack structure.
Claim 18
Dependent Claim
57 words
A method as claimed in claim 17, wherein each substrate of said multiple substrates having said at least one opening formed therein in said step (b) comprises a micromachine layer having a movable microstructure, said movable microstructures of said multiple micromachine layers forming said movable member subsequent to removing of said sacrificial material in said step (e).
Claim 19
Dependent Claim
73 words
A method as claimed in claim 18, wherein said plurality of substrates comprise silicon substrates, and said stacking step (d) comprises laminating said plurality of substrates together in said selected arrangement to form said stack structure, said laminating including establishing a layer of tungsten or titanium between adjacent substrates of said plurality of substrates and heat treating said stack structure to bond said adjacent substrates together via said layer of tungsten or titanium.
Claim 20
Dependent Claim
45 words
A method as claimed in claim 17, wherein said multiple substrates having said at least one opening formed therein in said step (b) each comprise a silicon substrate, and wherein said sacrificial material of said step (c) comprises one of polyimide, paralyene, nitride and oxide.
Claim 21
Independent Claim
141 words
A method for fabricating a machine comprising the steps of: (a) forming at least one opening in each of at least two substrates, said at least one openings defining microstructures in said at least two substrates that create said machine when said at least two substrates are stacked in a selected arrangement; (b) filling at least some of said at least one openings in said at least two substrates with a sacrificial material for temporarily securing together selected microstructures separated by said openings; (c) stacking said at least two substrates together in said selected arrangement, thereby forming a stack; and (d) removing said sacrificial material from said at least one opening in each of said at least two substrates, wherein a moveable member is defined within said stack by stacked microstructures of said at least two substrates, thereby forming said machine.
Claim 22
Dependent Claim
39 words
A method as claimed in claim 21, wherein said machine comprises an electrostatic machine, and wherein said forming step (a) and said stacking step (c) result in stacked microstructure of said at least two substrates defining a stator structure.
Claim 23
Dependent Claim
53 words
A method as claimed in claim 22, wherein said electrostatic machine comprises an electrostatic motor and said movable member comprises a rotor, and wherein said method further comprises the step of laminating an endcap substrate at each end of said stack formed in said step (c) to retain said rotor within said stack.
Claim 24
Dependent Claim
33 words
A method as claimed in claim 21, wherein said at least two substrates comprise silicon substrates and wherein said forming step (a) comprises wet etching said openings in said at least two substrates.
Claim 25
Dependent Claim
37 words
A method as claimed in claim 24, wherein said filling step (b) comprises filling at least some openings in said at least two silicon substrates with a sacrificial material comprising one of polyimide, paralyene, nitride and oxide.
Claim 26
Dependent Claim
60 words
A method as claimed in claim 25, wherein said stacking step (c) includes laminating said at least two substrates together in said selected arrangement, said laminating including establishing a layer of tungsten or titanium between said at least two substrates and heat treating said stack to bond said at least two substrates together via said layer of tungsten or titanium.
References Cited (Backward Citations)
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