Patent EP0725426A2 successfully refreshed from Google Patents.
EP0725426A2
Expired / Lapsed
EP
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High temperature polymide electrostatic chuck
Assignee: Applied Materials Inc
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Filing: 1996-01-31
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Granted: —
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Expires: 2016-01-31
Abstract
Abstract Two types of polymeric dielectric systems useful in construction of a high-temperature electrostatic chuck and a high temperature power connection for transmitting power are described. The first polymeric dielectric system provides for the use of polyimide films (114,124) which do not require an adhesive to adhere to an underlying substrate support platen (110). The self-adhering polyimide film (124) comprises from one to three layers of polyimide material, wherein at least one outer layer of polyimide material is thermoplastic in nature. The thermoplastic polyimide is placed in contact with a substrate (110) to which it is to bond, and heat and pressure are applied to cause the thermoplastic polyimide to flow and bond to the substrate (110). The second polymeric dielectric system provides for the use of a liquid polyamic acid or modified polyimide precursor which is cured in place against a substrate to provide a polyimide-comprising film adhered to the substrate.
Inventors
- 👤 Aihua Chen
- 👤 Vijay Parkhe
- 👤 Sergio Edelstein
Bibliographic Details
Application Number
—
Jurisdiction
EP
Data Source
google_patents
Last Synchronized
2026-11-04 07:36
CPC Classifications
H; H10; H10P; H10P72/00; H10P72/70; H10P72/72; H10P72/722
Claims Analysis
Total Claims: 15
Claim 1
Independent Claim
36 words
A multilayer electrostatic chuck means (112;600) comprising: at least one polyimide-comprising film (114,124;616,622) acting as a dielectric layer within said electrostatic chuck (112;600), wherein the polyimide-comprising film has a sustained operational temperature of at least 175°C.
Claim 2
Dependent Claim
58 words
The electrostatic chuck means (112;600) of Claim 1, comprising: at least one first polyimide-comprising film (124;616) adhered to an underlying substrate (110,614); at least one conductive layer (122;620) overlaying the first polyimide-comprising film (124;616); and a dielectric film (114;622) overlying said conductive layer (122;620); wherein said first polyimide-comprising film has a sustained operational temperature of at least 175°C.
Claim 3
Dependent Claim
16 words
The multilayer electrostatic chuck means of Claim 2, wherein said conductive layer (122;620) comprises a metal.
Claim 4
Dependent Claim
26 words
The multilayer electrostatic chuck means of Claim 3, wherein said metal is selected from the group consisting of copper, aluminum, chromium, tungsten, nickel, and combinations thereof.
Claim 5
Dependent Claim
48 words
The multilayer electrostatic chuck means of one of the preceding claims, wherein the thickness of said at least one polyimide-comprising film (124;616) ranges between about 25.4 µ (about 1 mil) and about 76.2 µ (about 3 mils), whereby heat transfer through said electrostatic chuck means (112;600) is improved.
Claim 6
Dependent Claim
36 words
The multilayer electrostatic chuck means of one of claims 2 to 5, wherein said dielectric film (114;622) overlying said conductive layer (122;620) is a second polyimide-comprising film having a sustained operational temperature of at least 175°C.
Claim 7
Dependent Claim
39 words
The multilayer electrostatic chuck means of one of claims 2 to 6, wherein the thickness of said conductive layer (122;620) ranges between about 1,000 Å and about 3,000 Å, whereby heat transfer through said electrostatic chuck means is improved.
Claim 8
Dependent Claim
29 words
The electrostatic chuck means of one of the preceding claims, wherein the sustained operational temperature of said electrostatic chuck means is at least 200°C, preferably at least about 400°C.
Claim 9
Dependent Claim
35 words
The multilayer electrostatic chuck means of one of the preceding claims, wherein each polyimide-comprising film (616;622) was formed using a thermoplastic polyimide-comprising film which was adhered to its underlying substrate (110;614) using heat and pressure.
Claim 10
Dependent Claim
39 words
The electrostatic chuck means of one of claims 1 to 8, wherein each polyimide-comprising film (616;622) was formed using a liquid precursor which was applied to its underlying substrate and cured in place to provide a solid polyimide-comprising film.
Claim 11
Dependent Claim
64 words
The electrostatic chuck means of one of claims 2 to 8, wherein one polyimide-comprising film (616) was formed using a thermoplastic polyimide-comprising film which was adhered to its underlying substrate (614) using heat and pressure and the other polyimide-comprising film (622) was formed using a liquid precursor which was applied to its underlying substrate and cured in place to provide a solid polyimide-comprising film.
Claim 12
Dependent Claim
78 words
An electrical connector for electrically connecting an electrostatic chuck (600) to a power supply, the connector being capable of sustained operation at elevated temperatures, the connector comprising: a) a conductive core electrically engaging the electrostatic chuck (600), the conductive core electrically connected to the power supply; and b) an insulator (440) electrically insulating the conductive core, the conductive core and insulator comprising materials capable of sustained operation at temperatures exceeding about 175°C with substantially no degradation in performance.
Claim 13
Dependent Claim
64 words
The electrical connector of Claim 12, wherein said conductive core includes: a conductive contact button (410) attached to a spring (420) which is further attached to a solid conductive center contact (430), wherein said insulator (440) is a dielectric insulator which surrounds at least a portion of said solid conductive center contact (430), and a conductive clip (450) which circumscribes said dielectric insulator (440).
Claim 14
Dependent Claim
27 words
The electrical connector of one of claims 12 or 13, wherein the materials of construction permit sustained operation at temperatures greater than 200°C, preferably greater than 400°C.
Claim 15
Dependent Claim
68 words
An electrical connector, especially according to one of claims 12 to 14, for power transmission in an electrostatic chuck, said electrical connector comprising: a coplanar feed through connection (615), wherein a conductive layer (620) is overlain upon the surface of a dielectric layer (616) having an opening (618) therethrough, to create an electrode of said electrostatic chuck while simultaneously providing an electrical contact with an underlying conductive contact.
References Cited (Backward Citations)
No citation records indexed.
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