Patent EP0718610A1 successfully refreshed from Google Patents.
EP0718610A1
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A method and apparatus for measuring substrate temperatures
Assignee: Applied Materials Inc
•
Filing: 1995-12-15
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Granted: —
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Expires: 2015-12-15
Abstract
Abstract A method of correcting a temperature probe reading in a thermal processing chamber (100) for heating a substrate (106), including the steps of heating the substrate (106) to a process temperature; using a first probe (150) and a second probe (152) to measure the temperature of the substrate (106), the first probe (150) having a first effective reflectivity and the second probe (152) having a second effective reflectivity, the first probe (150) producing a first temperature indication and the second probe (152) producing a second temperature indication, and wherein the first and second effective reflectivities are different; and from the first and second temperature indications, deriving a corrected temperature reading for the first probe (150), wherein the corrected temperature reading is a more accurate indicator of an actual temperature of the substrate (106) than are uncorrected readings produced by both the first and second probes (150, 152).
Inventors
- 👤 Bruce W. Peuse
- 👤 Gary E. Miner
- 👤 Mark Yam
Bibliographic Details
Application Number
—
Jurisdiction
EP
Data Source
google_patents
Last Synchronized
2026-11-09 02:15
CPC Classifications
H; H10; H10P; H10P72/00; H10P72/06; H10P72/0602; H10P72/04; H10P72/0431; H10P72/0434; G; G01; G01J; G01J5/00; G01J5/0003; G01J5/0007; G01J5/02; G01J5/04; G01J5/041; H10P74/00; H10P74/23; H10P74/27; Y; Y10; Y10S; Y10S977/00; Y10S977/902; Y10S977/904; Y10S977/918
Claims Analysis
Total Claims: 42
Claim 1
Independent Claim
132 words
A method of correcting a temperature probe reading in
a thermal processing chamber for heating a substrate, said
method comprising: heating the substrate to a process temperature; using a first probe and a second probe to measure the
temperature of the substrate, said first probe having a
first effective reflectivity and said second probe having a
second effective reflectivity, the first probe producing a
first temperature indication and the second probe producing
a second temperature indication, and wherein the first and
second effective reflectivities are different; and from the first and second temperature indications,
deriving a corrected temperature reading for the first
probe, wherein the corrected temperature reading is a more
accurate indicator of an actual temperature of the
substrate than are uncorrected readings produced by both
the first and second probes.
Claim 2
Dependent Claim
26 words
The method of claim 1 further comprising using a
first noncontacting probe for the first probe and using a
second noncontacting probe for the second probe.
Claim 3
Dependent Claim
16 words
The method of claim 1 further comprising using
optical pyrometers for the first and second probes.
Claim 4
Dependent Claim
23 words
The method of claim 2 wherein the temperature
measurements that are performed using the first and second
probes are performed closely in time.
Claim 5
Dependent Claim
21 words
The method of claim 2 wherein the temperature
measurements that are performed using the first and second
probes are performed concurrently.
Claim 6
Dependent Claim
17 words
The method of claim 1 wherein the first effective
reflectivity is larger than the second effective
reflectivity.
Claim 7
Dependent Claim
25 words
The method of claim 2 wherein the first effective
reflectivity has a value near one and the second
effective reflectivity has a value below 0.5.
Claim 8
Dependent Claim
36 words
The method of claim 2 wherein the deriving step
comprises correcting the temperature indication of the
first probe by adding a correction quantity that is derived
from a difference between the first and second temperature
indications.
Claim 9
Dependent Claim
35 words
The method of claim 8 wherein the deriving step
further comprises determining a difference between the
first and second temperature indications and multiplying
that temperature difference by a correction factor to
generate the correction quantity.
Claim 10
Dependent Claim
36 words
The method of claim 4 wherein the deriving step
comprises using the first and second temperature
indications to compute an emissivity for the substrate and
then computing the corrected temperature reading from the
computed substrate emissivity.
Claim 11
Dependent Claim
24 words
The method of claim 10 wherein the deriving step
further comprises using the substrate emissivity to compute
an effective emissivity for the first probe.
Claim 12
Dependent Claim
26 words
The method of claim 10 wherein the deriving step
further comprises using the computed effective emissivity
of the first probe to compute the corrected temperature
reading.
Claim 13
Independent Claim
198 words
A method of calibrating a temperature measurement
system comprising: heating a first substrate having a high emissivity to
a first process temperature; while the substrate is at the first process
temperature, calibrating a first probe and a second probe
to produce temperature indications that are substantially
the same, said first probe having associated therewith a
first effective reflectivity and said second probe having
associated therewith a second effective reflectivity, said
first and second effective reflectivities being different; heating a second substrate having a low emissivity to
a second process temperature, said low emissivity being
lower than said high emissivity; with the second substrate at said second process
temperature, using both the first probe and a second probe
to measure the temperature of the substrate, the first
probe producing a first temperature indication and the
second probe producing a second temperature indication; measuring a sensitivity of the temperature readings
produced by the first probe to changes in substrate
emissivity; and by using said measured sensitivity and the first and
second temperature indications, computing a correction
factor for the first probe, said correction factor to be
applied to temperature readings of the first probe to
produce a corrected temperature readings.
Claim 14
Dependent Claim
17 words
The method of claim 13 wherein the first effective
reflectivity is larger than said second effective
reflectivity.
Claim 15
Dependent Claim
31 words
The method of claim 14 wherein the step of computing
comprises computing a difference between the first and
second temperature indications and using the computed
difference to compute the correction factor.
Claim 16
Dependent Claim
36 words
The method of claim 15 wherein the step of measuring
said sensitivity comprises thermal processing two
substrates, each having different emissivities, and then
measuring a difference in characteristics of said two
substrates to determine said sensitivity.
Claim 17
Independent Claim
85 words
An apparatus for measuring the temperature of a
substrate in a thermal processing heating chamber, the
apparatus comprising: a reflecting plate placed next to one surface of the
substrate to form a reflecting cavity therebetween; a first probe positioned to receive energy from the
reflecting cavity and produce a first temperature reading;
and a second probe positioned to receive energy from the
reflecting cavity and produce a second temperature reading,
said first probe yielding a different effective
reflectivity for said cavity than said second probe.
Claim 18
Dependent Claim
14 words
The apparatus of claim 17 wherein the first and
second probes comprise light pipes.
Claim 19
Dependent Claim
32 words
The apparatus of claim 17 wherein the first and
second probes are positioned in a first hole and a second
hole, respectively, said first and second holes formed in
the reflecting plate.
Claim 20
Dependent Claim
30 words
The apparatus of claim 19 wherein said first and
second holes are located so as to be on approximately equal
radii relative to an axis of rotation of the substrate.
Claim 21
Dependent Claim
24 words
The apparatus of claim 20 wherein the radii at which
the first and second probes are located differ by no more
than 3 cm.
Claim 22
Dependent Claim
27 words
The apparatus of claim 19 wherein said first and
second holes are positioned so as to read a temperature of
approximately the same region of the substrate.
Claim 23
Dependent Claim
20 words
The apparatus of claim 22 wherein said first and
second holes are within 1 to 3 cm of each other.
Claim 24
Dependent Claim
68 words
The apparatus of claim 17 further comprising a
temperature measurement module which during processing
receives first and second temperature indications from the
first and second probes, respectively, said module
programmed to derive a corrected temperature reading from
first and second temperature indications, said corrected
temperature reading being a more accurate indicator of the
actual temperature of the substrate than are uncorrected
readings of the first or second probes.
Claim 25
Dependent Claim
42 words
The apparatus of claim 24 wherein said first probe
yields a first effective reflectivity for said cavity and
said second probe yields a second effective reflectivity
for said cavity and wherein the first effective
reflectivity is larger than said second effective
reflectivity.
Claim 26
Dependent Claim
34 words
The apparatus of claim 25 wherein the module is
programmed to derive the corrected temperature reading by
adding a correction quantity that is derived from a
difference between the first and second temperature
indications.
Claim 27
Dependent Claim
43 words
The apparatus of claim 26 wherein the module is
programmed to derive the corrected temperature reading by
determining a difference between the first and second
temperature indications and then by multiplying that
temperature difference by a correction factor to generate
the correction quantity.
Claim 28
Dependent Claim
43 words
The apparatus of claim 25 wherein the module is
programmed to derive the corrected temperature reading by
using the first and second temperatures indications to
compute an emissivity for the substrate and then compute
the corrected temperature reading from the computed
substrate emissivity.
Claim 29
Dependent Claim
30 words
The apparatus of claim 28 wherein the module is
programmed to derive the corrected temperature reading by
using the substrate emissivity to compute an effective
emissivity for the first probe.
Claim 30
Dependent Claim
32 words
The apparatus of claim 29 wherein the module is
programmed to derive the corrected temperature reading by
using the computed effective emissivity of the first probe
to compute the corrected temperature reading.
Claim 31
Dependent Claim
33 words
The apparatus of claim 17 further comprising a
heating element for heating the substrate during thermal
processing and wherein during processing the substrate is
positioned between the heating element and the reflecting
plate.
Claim 32
Dependent Claim
25 words
The apparatus of claim 31 wherein the substrate has a
backside and the reflecting plate forms a reflecting cavity
with the backside of the substrate.
Claim 33
Independent Claim
96 words
An apparatus for measuring the temperature of a
localized region on a substrate in a thermal processing
chamber, said apparatus comprising: a support structure supporting the substrate within
said thermal processing chamber; an energy probe having an end receiving radiation
from the substrate during thermal processing, said energy
probe providing a signal representative of the temperature
of a localized region of the substrate; and a concave microcavity formed around the end of the
energy probe, said concave microcavity having a radiation
reflecting surface facing said localized region of the
substrate and serving to enhance said signal.
Claim 34
Dependent Claim
44 words
The apparatus of claim 33 further comprising a
reflector plate located so as to form a reflecting cavity
with one side of said substrate when said substrate is
supported within said chamber, said concave microcavity
sampling energy within said reflecting cavity during
thermal processing.
Claim 35
Dependent Claim
31 words
The apparatus of claim 34 wherein said reflecting
plate has a planar reflecting surface that faces said
substrate and has an area that is at least as large as
the substrate.
Claim 36
Dependent Claim
39 words
The apparatus of claim 33 wherein said reflecting
plate has a reflecting surface that faces the substrate,
and wherein said reflecting surface has an area that is
substantially larger than a projection of the concave
microcavity onto said substrate.
Claim 37
Dependent Claim
14 words
The apparatus of claim 36 wherein said reflecting
surface is a planar reflecting surface.
Claim 38
Dependent Claim
19 words
The apparatus of claim 36 wherein said concave
microcavity is formed in the reflecting surface of said
reflecting plate.
Claim 39
Dependent Claim
12 words
The apparatus of claim 38 wherein said concave
microcavity is cylindrically shaped.
Claim 40
Dependent Claim
12 words
The apparatus of claim 38 wherein said concave
microcavity is hemispherically shaped.
Claim 41
Dependent Claim
39 words
The apparatus of claim 38 wherein said reflecting
plate is separated from said substrate by a first distance
and wherein the concave microcavity has an opening facing
said substrate that has dimensions that are smaller than
said first distance.
Claim 42
Dependent Claim
28 words
The apparatus of claim 33 wherein said support
structure supports the substrate by contacting the
substrate in a region that is located around the perimeter
of the substrate.
References Cited (Backward Citations)
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