A processing chamber gas distribution manifold

Claim 2

Aprocessing chamber gas distribution manifold as in Claim 1; wherein said set of predefined passages are generally equally distributed about the processing chamber.

Claim 3

Aprocessing chamber gas distribution manifold as in Claim 1; wherein said set of predefined passages are created according to predetermined pattern, where said set of predefined passages are not generally equally distributed about the processing chamber.

Claim 4

Aprocessing chamber gas distribution manifold as in Claim 1, wherein, said series of predefined passages are grooves in a surface of said ring facing said channel.

Claim 5

Aprocessing chamber gas distribution manifold as in Claim 1, wherein said passages are generally open to a center portion of said processing chamber and create passages that cause flow restrictions for gas flow emerging from said passages in directions other than toward the center portion of said processing chamber, such that a substantial portion of the gas flow passing through said passages is directed toward the center portion of said chamber, and a negligible portion of the gas flow passing through said passages is directed in directions other than toward the center portion of said chamber.

Claim 6

Aprocessing chamber gas distribution manifold as in Claim 5, wherein each of said passages includes a slot which connects the end of said channel with an inner circumferential surface of said ring.

Claim 7

A processing chamber gas distribution system comprising: a chamber having a gas distribution opening forming a generally annular channel; a gas distribution ring having a surface facing said opening, said surface including a set of predefined grooves which are connected and provide a passage between an inside of said channel and said processing chamber.

Claim 8

A processing chamber gas distribution system as in Claim 7, wherein said chamber includes a dome portion and a gas feed ring surrounding said dome portion, wherein said gas distribution opening forming said generally annular channel includes opposing walls of said channel adjacent said opening, wherein a first wall of said opposing walls includes a surface of said dome portion and a second of said opposing walls includes a surface of said gas feed ring, such that said opening is formed between said surface of said dome portion and said surface of said gas feed ring.

Claim 9

Aprocessing chamber gas distribution system as in Claim 8, wherein said gas distribution ring acts as a spacer to separate said dome portion of said processing chamber from a lower processing chamber wall, such that only a portion of said ring is openly exposed to the gas in the processing chamber.

Claim 10

A processing chamber gas distribution system comprising: a chamber dome section having an outer surface circumscribing a perimeter of said dome section wherein said surface is defined by a first set of predetermined dimensions from a center of said chamber; a gas feed ring having an inner surface facing and spaced from said outer surface of said chamber dome section to provide a generally continuous annular gas distribution channel between said inner surface and said outer surface, wherein said gas feed ring includes seal features to seal between said chamber dome section and a circumferential wall of a processing chamber, wherein said wall of said processing chamber including a shelf recess; a gas distribution ring configured to be supported in said shelf recess, said ring having a top surface facing and generally in contact with said annular gas distribution channel to obstruct gas flowing from said gas distribution channel; said distribution ring including a set of gas passages from said opening of said gas distribution channel to an inside of said processing chamber.

Claim 11

Aprocessing chamber gas distribution system as in Claim 10, wherein said set of gas passages from said opening of said gas distribution channel to said inside of said processing chamber include a series of slots or grooves in said top surface of said gas distribution ring such that gas flow to said inside of said processing chamber from said annular gas distribution channel flows through a passage formed by the surface of said slots or grooves and the edge of the dome portion opposite said slots or grooves.

Claim 12

In an evacuable processing chamber having a dome for containing a substrate fabrication process and gas channels adapted to transmit process gas into the interior of the chamber, the improvement comprising; a first annular generally flat end surface defining the outlet of the dome, and orthogonal to the dome axis of symmetry; a second annular end surface on said dome located outwardly of and intersecting said first end surface; a first ring positioned coaxially with said chamber at the outlet thereof and having generally flat parallel faces, one of which overlaps said first end surface while extending outwardly of said second end surface; a second ring having a generally cylindrical inner face and positioned coaxially with said dome, with said inner face and said second surface in opposed facing relationship so as to define a confined thin annular space about said second end surface, said second ring having defined therein at least one passageway opening into said annular space and adapted to communicate with an external end source; said first ring being provided with a plurality of surface grooves extending from the innermost edge of said one surface outwardly to communicate with said annular space; whereby gas may be evenly injected via said internal passageway, the annular space, and the grooves into the process chamber in a pattern controllable by the positions and configuration of said grooves.

Claim 13

The combination of Claim 12 in which a first pressure sealer is provided between said first ring and said second ring outwardly of said annular space to provide a seal for said annular space downstream of said passageway outlet.

Claim 14

The combination of Claim 13 in which a second pressure sealer is provided between an outer surface of said dome and said second ring outwardly of said annular space and oppositely from said first sealer to provide an effective seal for said annular space upstream of said passageway outlet.

Claim 15

The combination of Claim 12 which further includes a chamber dome support defining recesses into which said first and second rings are embraced and supported, with said dome being secured to said rings and dome support in gas-tight relationship.

Claim 16

The combination of Claim 12, in which said dome is sealed to said second ring adjacent a periphery of said thin annular space and upstream of said opening of said internal gas passageway, such that the outlet sealing of the dome is protected by positive gas pressure against the processing environment within the processing chamber.