Patent US661444A successfully refreshed from Google Patents.
Patent EP0675365A2 successfully refreshed from Google Patents.
EP0675365A2
Expired / Lapsed
EP
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Acceleration sensor and method for producing the same
Assignee: Panasonic Holdings Corp
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Filing: 1995-03-28
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Granted: —
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Expires: 2015-03-28
Abstract
Abstract An acceleration sensor includes: a piezoelectric vibrator including a piezoelectric element having a first principal surface and a second principal surface opposed each other, a first and a second electrode formed on the first and the second principal surface, and conductive protrusions made of a metal material or a ceramic material and formed by a thermal spraying process; and a holding body for holding the piezoelectric vibrator via - the conductive protrusions.
Inventors
- 👤 Tetsuro Otsuchi
- 👤 Osamu Kawasaki
- 👤 Hidenobu Shintaku
- 👤 Shigeo Suzuki
- 👤 Takahiro Nishikura
- 👤 Katsumi Imada
- 👤 Katsu Takeda
- 👤 Masanori Sumihara
- 👤 Takashi Nojima
Bibliographic Details
Application Number
—
Jurisdiction
EP
Data Source
google_patents
Last Synchronized
2026-11-08 21:17
CPC Classifications
H; H03; H03H; H03H9/00; H03H9/15; H03H9/17; H03H9/176; G; G01; G01P; G01P15/00; G01P15/02; G01P15/08; G01P15/09; G01P15/0922; H03H9/02; H03H9/05; H03H9/10; H03H9/1007; H03H9/1014; H03H9/1028
Claims Analysis
Total Claims: 20
Claim 1
Independent Claim
71 words
An acceleration sensor comprising a piezoelectric vibrator including a piezoelectric element having a first principal surface and a second principal surface opposed each other, a first and a second electrode formed on the first and the second principal surface, and conductive protrusions made of a metal material or a ceramic material and formed by a thermal spraying process; and a holding body for holding the piezoelectric vibrator via the conductive protrusions.
Claim 2
Dependent Claim
21 words
An acceleration sensor according to claim 1, wherein the conductive protrusions are formed in longitudinal central portions of the piezoelectric vibrator.
Claim 3
Dependent Claim
48 words
An acceleration sensor according to claim 1, wherein the holding body includes a holding member having an elastic property, and the piezoelectric vibrator is held by the holding member via at least one of the conductive protrusions formed on the first and second electrode of the piezoelectric vibrator.
Claim 4
Dependent Claim
31 words
An acceleration sensor according to claim 1, wherein the piezoelectric vibrator is press-fitted into the holding body and the piezoelectric vibrator is held via the conductive protrusions by the holding body.
Claim 5
Dependent Claim
42 words
An acceleration sensor according to claim 1, wherein the holding body includes a holding member made of a material having a lower hardness than that of the conductive protrusions and at least one of the protrusions is press-fitted into the holding member.
Claim 6
Dependent Claim
72 words
An acceleration sensor according to claim 1, wherein the piezoelectric element is selected from a group including: a bimorph piezoelectric element; a multilayered piezoelectric element obtained by attaching multiple piezoelectric plates; a single layered piezoelectric element; a unimorph piezoelectric element obtained by attaching a piezoelectric plate to a shim; a bimorph piezoelectric element interposing a shim therebetween; and a piezoelectric element including a piezoelectric film deposited on a substrate and an electrode.
Claim 7
Dependent Claim
48 words
An acceleration sensor according to claim 1, wherein the piezoelectric vibrator further comprising protrusions made of a metal material or a ceramic material and formed by a thermal spraying process in longitudinal end portions of the piezoelectric vibrator on at least one of the first and second electrodes.
Claim 8
Dependent Claim
24 words
An acceleration sensor according to claim 1, wherein the conductive protrusions ate arranged in a symmetric manner on the first and the second electrodes.
Claim 9
Dependent Claim
23 words
An acceleration sensor according to claim 1, wherein the conductive protrusions are linear protrusions extending in a width direction of the piezoelectric vibrator.
Claim 10
Dependent Claim
28 words
An acceleration sensor according to claim 1, wherein a length in a longitudinal direction of the piezoelectric element is longer than 3.5 times of that in width direction.
Claim 11
Dependent Claim
24 words
An acceleration sensor according to claim 1, wherein a height of the conductive protrusions is in a range of 50 µm to 150 µm.
Claim 12
Independent Claim
71 words
A method for producing an acceleration sensor comprising a piezoelectric vibrator including a piezoelectric element having a first principal surface and a second principal surface opposed each other, a first and a second electrode formed on the first and the second principal surface, comprising the step of: forming a conductive protrusion by thermally spraying a metal material or a ceramic material on at least one of the first and second electrodes.
Claim 13
Dependent Claim
29 words
A method for producing an acceleration sensor according to claim 12, further comprising a step of forming a holding body for holding the piezoelectric element via the conductive protrusion.
Claim 14
Dependent Claim
57 words
A method for producing an acceleration sensor according to claim 12, wherein the conductive protrusion forming step includes a step of forming the protrusion on the piezoelectric element by thermally spraying a metal material or a ceramic material via a mask having a opening in a portion corresponding to a longitudinal central portion of the piezoelectric vibrator.
Claim 15
Dependent Claim
27 words
A method for producing an acceleration sensor according to claim 12, wherein the opening is a linear opening extending in a width direction of the piezoelectric vibrator.
Claim 16
Dependent Claim
23 words
A method for producing an acceleration sensor according to claim 12, wherein the protrusion is formed on the first and the second electrodes.
Claim 17
Dependent Claim
28 words
A method for producing an acceleration sensor according to claim 12, wherein a height of the conductive protrusions is in a range of 50 µm to 150 µm.
Claim 18
Dependent Claim
50 words
A method for producing an acceleration sensor according to claim 13, wherein the holding body includes a holding member having an elastic property, and the piezoelectric vibrator is held by the holding member via at least one of the conductive protrusions formed on the first and second electrode piezoelectric vibrator.
Claim 19
Dependent Claim
46 words
A method for producing an acceleration sensor according to claim 13, wherein the holding body includes a holding member made of a material having a lower hardness than that of the conductive protrusions and at least one of the protrusions is press-fitted into the holding member.
Claim 20
Dependent Claim
46 words
A method for producing an acceleration sensor according to claim 12, further comprising a step of forming protrusions by thermally spraying a metal material or a ceramic material in longitudinal end portions of the piezoelectric vibrator on at least one of the first and second electrodes.
References Cited (Backward Citations)
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