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EP0651424A2 Expired / Lapsed EP ⏱️ 0.0 years remaining

Quasi-infinite heat source/sink

Assignee: Applied Materials Inc
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Filing: 1994-10-28
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Granted: —
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Expires: 2014-10-28
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Abstract

Abstract An apparatus and method for controlling the temperature of an object, in particular a semiconductor wafer support structure (62) in a wafer processing chamber. A gas gap (64) is created between the two adjacent objects (62, 70) of different temperatures. The pressure in the gap (64) is adjusted to control the thermal conductivity of the gas between the two structures. To have a large heat flow between the two objects (62, 70) so that their temperatures can be closely matched, the pressure is increased. To maintain the temperature of the object (62) sought to be controlled regardless of the temperature of the adjacent item (heat source/sink) the pressure is reduced to a strong vacuum (acting as insulation) so that very little heat flow occurs through the gas gap (64). Localized control acts together with a local heat sink to precisely control the temperature of a semiconductor support structure pedestal/cathode (62) to maintain the uniformity of the temperature of the wafer during processing to prevent wafer surface process anomalies due to variations and gradients in temperature.

Inventors

  • 👤 Gregory W. White

Bibliographic Details

Application Number —
Jurisdiction EP
Data Source google_patents
Last Synchronized 2026-11-09 02:55
CPC Classifications
H; H10; H10P; H10P72/00; H10P72/04; H10P72/0431; H10P72/0434; H10P72/0432; H10P72/06; H10P72/0602

Claims Analysis

Total Claims: 19
Claim 1
Independent Claim 134 words
Apparatus for adjustably adding or removing heat from a first object (62) having a first heat transfer surface (66), comprising: a second object (70) capable of storing heat having a second heat transfer surface (67) disposed adjacent the first surface (66) so as to define a narrow gap (64) between a substantial portion of said surfaces (66, 67); a gas tight seal (65, 68) about said gap (94), and confining a gas therewithin; a pressure controller (75) communicating with said gap (64) and controlling the pressure of the gas within said gap (64) in response to a control signal; and a temperature sensor (63) to sense the temperature of said object (62) and to provide said control signal to said pressure controller, said control signal being a function of the temperature of said object.
Claim 2
Dependent Claim 35 words
Apparatus as in claim 1, which further includes: a source/sink of heat coupled to said second object (70) to maintain said second object (70) at a temperature differential ith respect to the first object (62).
Claim 3
Dependent Claim 79 words
Apparatus as in claim 1, which further includes: a third object (146) similar to said second object (145) and a comparable relationship to said first heat transfer surface so as to form a second gap (153), said second object (145) acting as a heat sink and said third object (146) acting as a heat source to facilitate controlling the temperature of the first object to a preselected value between respective temperatures of said second and third objects (145, 146).
Claim 4
Dependent Claim 42 words
Apparatus as in claim 3, which further includes: a controller to increase the pressure within one of said gaps while simultaneously decreasing the pressure in the other of said gaps so as to rapidly attain a preselected temperature for the first object.
Claim 5
Dependent Claim 19 words
Apparatus as in any of claims 1 to 4, in which said first object is of a metallic material.
Claim 6
Dependent Claim 180 words
A quasi infinite energy source/sink system comprising: an object (62) whose temperature is to be controlled, said object (62) having a first heat transfer surface (66); a local heat sink (70) disposed adjacent to said object (62) having a second heat transfer surface (67), a sealed gap (64) being formed between a substantial portion of said first heat transfer surface (66) and a substantial portion of said second heat transfer surface (67), said gap (64) being filled with a gas, said first heat transfer surface (66) and said second heat transfer surface (67) comprising a substantial portion of the contact between said object (62) and local heat sink (70); a temperature sensor (63) to sense the temperature of said object (62) and provide a signal to a temperature controller (69), said temperature controller (69) providing a control signal to a pressure control mechanism (75) connected to said gap (64), said control mechanism (75) controls the pressure of gas in the sealed gap (64) to control the transfer of thermal energy between the object (62) and the local heat sink (70).
Claim 7
Dependent Claim 30 words
A quasi infinite energy source/sink system as in claim 6, further comprising: a global heat sink (73) coupled to said local heat sink (70) to provide additional heat sink capacity.
Claim 8
Dependent Claim 42 words
A quasi infinite energy source/sink system as in claim 7, wherein said local heat sink (70) includes a fluid passage for heat transfer therethrough, said global heat sink (73) supplying said fluid to said local heat sink (70) at a first temperature.
Claim 9
Dependent Claim 32 words
A quasi infinite energy source/sink system as in any of claims 1 to 6, wherein a surface area of said first heat transfer surface (66) includes a series of ridges and valleys.
Claim 10
Dependent Claim 111 words
A quasi infinite energy source/sink system as in any of claims 6 to 9, wherein said pressure control mechanism (75) includes bellows (80) connected to said gas gap (64), the gas gap (64) and bellows (80) forming a closed gas gap system, said bellows (80) being enclosed in a bellows enclosing chamber (82), wherein the pressure in said bellows enclosing chamber (82) is controlled by a pressure regulator (84) controlled by said temperature controller (69), and wherein the bellows volume automatically adjusts to pressure changes in the bellows enclosing chamber (82) to make the pressure in the gas gap system substantially equal to the pressure in said bellows enclosing chamber (82).
Claim 11
Dependent Claim 131 words
A quasi infinite energy source/sink system as in any of claims 6 to 9, wherein said pressure control mechanism (75) includes bellows (90) connected to said gas gap (64), the gas gap (64) and bellows (90) forming a closed gas gap system, said bellows (90) being enclosed in a bellows enclosing frame (92), a mechanical bellows manipulator (93) connects between the bellows (90) and said bellows enclosing frame (92), wherein said mechanical bellows manipulator (93) can expand and compress the bellows (90) to increase or decrease the volume of the gas gap system, the bellows manipulator (93) is controlled by said temperature controller (69), and wherein the mechanical bellows manipulator (93) adjusts the pressure in the bellows (90) to control the thermal conductivity of the gas in the gas gap system.
Claim 12
Dependent Claim 106 words
A quasi infinite energy source/sink system as in any of claims 6 to 9, wherein said gas filling said gap (64) is adsorptive to gas adsorption material, wherein said pressure control mechanism (75) includes an adsorptive material enclosing chamber (101) connected to said gas gap (64), the gas gap (64) and adsorptive enclosing chamber (101) forming a closed gas gap system, a gas adsorptive material media being disposed in said adsorptive material enclosing chamber (101), said adsorptive material enclosing chamber (101) being disposed in close proximity to a heating source (102), and wherein activation of said heating source (102) is controlled by said temperature controller (69).
Claim 13
Dependent Claim 28 words
A quasi infinite energy source/sink system as in claim 12, wherein said heating source (102) includes a series of heating coils surrounding said adsorptive material enclosing chamber (101).
Claim 14
Dependent Claim 244 words
A quasi infinite energy source/sink system comprising: an object whose temperature is to be controlled, said object having a first heat transfer surface; a local heat source/sink comprising, a local heat sink disposed adjacent to said object, said sink having a second heat transfer surface facing said first heat transfer surface, a local heat source disposed adjacent to said object, said heat source being disposed adjacent to and insulated from said heat sink, said source having a third heat transfer surface facing said first heat transfer surface; a first sealed gap being formed between a substantial portion of said first heat transfer surface and a substantial portion of said second heat transfer surface, a second sealed gap being formed between a substantial portion of said first heat transfer surface and a substantial portion of said third heat transfer surface, said first gap and said second gap being filled with a gas; a temperature sensor to sense the temperature of said object and provide a signal to a temperature controller, said temperature controller providing a first control signal to a first pressure control mechanism connected to said first gap and a second control signal to a second pressure control mechanism connected to said second gap, said first and said second control mechanisms control the pressure of gas in said first and said second sealed gaps to control the transfer of thermal energy between the object and said local heat sink and said local heat source.
Claim 15
Dependent Claim 111 words
Method for transferring heat to or from a first object, comprising the steps of: providing a second object capable of storing heat adjacent the first object, said second object being provided with a heat-exchanging surface conforming to a complementary surface of the first object; positioning said heat exchanging surface closely adjacent the complementary surface of the first object so as to define a gap therebetween; confining a gas between said heat-exchanging surface and said complementary surface within said gap; and increasing or decreasing the pressure of said gas in said gap to increase or decrease the conduction of heat across said gap to maintain the first object at a preselected temperature.
Claim 16
Dependent Claim 45 words
Method as in claim 15, which further includes the steps of: varying the pressure of said gas in said gap in response to a control signal; and sensing the temperature of the first object providing said control signal varying as a function of said temperature.
Claim 17
Dependent Claim 44 words
Method as in claim 15 or 16, which further includes the step of: providing a third object having a heat-exchanging surface closely adjacent to the complementary surface of the first object so as to define another gap therebetween within which is confined a gas.
Claim 18
Dependent Claim 51 words
Method as in claim 17, in which said third object is cooled, and said second object is heated, and in which the gas pressures within said gaps are respectively increased and decreased in order to rapidly control the first object to a temperature between that of said second and third objects.
Claim 19
Dependent Claim 43 words
Method as in claim 15, which further includes the step of: providing a source/sink of heat transmitting heat between said second object and said source/sink of heat to maintain said second object generally at a temperature differential as compared to the first object.

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